Mass Flow Controller

5-50,000 sccm

2-100% of Full Scale

Compatible with:
6 mm Swagelok
8 mm Swagelok
10 mm Swagelok
12 mm Swagelok
0.125 in. Swagelok (for 1000 sccm N2 equivalent or below)
0.25 in. Swagelok
0.5 in. Swagelok
0.375 in. Swagelok
Swagelok 4 VCO male
Swagelok 4 VCR male
Swagelok 8 VCR male
Swagelok 8 VCO Male
Swagelok 2 VCR Male (for 1000 sccm N2 equivalent or below)
KF-16

Viton®
Buna-N
Neoprene®
EPDM
Kalrez

EtherCAT
DeviceNet
RS485 (9 pin connector)
Profibus (1480 Compatible)
Profibus (1179B Compatible)
PROFINET
9 pin D connector (Analog 0-5 VDC)
9 Pin D connector, Tied Grounds (Analog 0-5 VDC)
15 pin D connector (Analog 0-5 VDC)
15 pin D connector, Tied Grounds (Analog 0-5 VDC)
15 pin D connector (Analog 4-20 mA)

150 psig

10-5000 sccm; 10-40 psid, 10000-0000 sccm; 15-40 psid, 30000-50000 sccm; 25-40 psid

1000 psig

1500 psig

± 1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale

± 0.3% of Reading

0.1% of Full Scale

< 0.05% of Full Scale/°C

< 0.08% of Reading/°C

< 0.02% of Reading/psi

<750 msec, typical above 5% Full Scale

30 minutes

10-50°C

0-95% Relative Humidity, non-condensing

-20° to 80°C

< 1 x 10^-09 (scc/sec He)

Up to 10K valve <0.1% of Full Scale at 40 psig to atmosphere, 20K - 50K valve <1.0% of Full Scale at 40 psig to atmosphere

316L S.S. VAR, 316 S.S., Elgiloy®, KM-45

16µ inch average Ra

3 lbs (1.4 kg)

CE