High Accuracy Mass Flow Verifier
Model: ha-mfv-mass-flow-verifier
High Accuracy Mass Flow Verifier
Model: ha-mfv-mass-flow-verifier
Technical Specs
Mass Flow Verification Accuracy
±1.0% of Reading
Mass Flow Verification Range
5 - 3000 sccm (N2 equivalent)
Repeatability
±0.5% of Reading
Reproducibility
±0.3% of Reading
Pressure Range
100 Torr
Pressure Accuracy
0.25% of Reading
Proof Pressure
45 psia
Burst Pressure
150 psig
Minimum Penumatic Air Supply Pressure
80 psig
Maximum Penumatic Air Supply Pressure
100 psig
Span Temperature Coefficient
<0.002% Reading/°C
Warm-up Time
60 minutes
Operating Temperature
10° to 40°C
Temperature Display
0 - 100°C
Temperature Accuracy
± 2°C
Temperature Resolution
0.1°C
Storage Humidity
0 to 95% RH non-condensing
Storage Temperature
-20° to 60°C
Control Interface
DeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
Diagnostic Interface
Ethernet RJ-45 female
Input Voltage
11 to 25 VDC
Gas Supply Fitting
Swagelok® compatible 8-VCR® female, rotatable
Vacuum Supply Fitting
Swagelok® compatible 8-VCR® male type, rotatable
Pneumatic Air Supply Fitting
1/8 inch one-touch quick connect tube
External Leak Integrity
<1 x 10-9 scc/sec He
Wetted Materials
316L SST passivated, Inconel, Incoloy
Seal Material
316 SST nickel plated
Valve Seat Material
PCTFE with Elgiloy® Diaphragm
Surface Finish
<32 µ inches Ra
Dimensions
6.98 x 10.0 x 10.0 in.
Weight
23.9 lbs
Compliance
CE
Technical Specs
Mass Flow Verification Accuracy
±1.0% of Reading
Mass Flow Verification Range
5 - 3000 sccm (N2 equivalent)
Repeatability
±0.5% of Reading
Reproducibility
±0.3% of Reading
Pressure Range
100 Torr
Pressure Accuracy
0.25% of Reading
Proof Pressure
45 psia
Burst Pressure
150 psig
Minimum Penumatic Air Supply Pressure
80 psig
Maximum Penumatic Air Supply Pressure
100 psig
Span Temperature Coefficient
<0.002% Reading/°C
Warm-up Time
60 minutes
Operating Temperature
10° to 40°C
Temperature Display
0 - 100°C
Temperature Accuracy
± 2°C
Temperature Resolution
0.1°C
Storage Humidity
0 to 95% RH non-condensing
Storage Temperature
-20° to 60°C
Control Interface
DeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
Diagnostic Interface
Ethernet RJ-45 female
Input Voltage
11 to 25 VDC
Gas Supply Fitting
Swagelok® compatible 8-VCR® female, rotatable
Vacuum Supply Fitting
Swagelok® compatible 8-VCR® male type, rotatable
Pneumatic Air Supply Fitting
1/8 inch one-touch quick connect tube
External Leak Integrity
<1 x 10-9 scc/sec He
Wetted Materials
316L SST passivated, Inconel, Incoloy
Seal Material
316 SST nickel plated
Valve Seat Material
PCTFE with Elgiloy® Diaphragm
Surface Finish
<32 µ inches Ra
Dimensions
6.98 x 10.0 x 10.0 in.
Weight
23.9 lbs
Compliance
CE
Resources & Downloads
Literature
Technical Notes
