High Power Microwave Plasma System
Model: high-power-microwave-plasma-system
High Power Microwave Plasma System
Model: high-power-microwave-plasma-system
Technical Specs
Maximum Plasma Power Output
6.0 kW
Frequency
2,440-2,470 MHz
Ripple
2,440-2,470 MHz
Output Accuracy
<1% closed loop control
Ambient Temperature
Up to 40°C max
Generator to Head Distance
Up to 100 feet max
Microwave Connections
WR284F waveguide with CPR284F flanges
Power Requirements
200-208 VAC, 3 phase, 50/60 Hz
Autotune
<1.5 seconds with <2% reflected power
Chemistries
O2, N2H2, N2, H2O, NH3, H2
Applicator Material
Quartz or Sapphire
Gas Flow Range
1 - 10 slm
Operating Pressure
1 - 10 Torr
Communications
Analog, RS485
Compliance
CE
Configuration
KF40, custom
Cooling
Water: 1 GPM, 20-30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
Power Supply Generator Dimensions
(7U rack) 19 H x 12.2 W x 20.03 D in. (482.6 x 309.88 x 508.76 mm)
Power Head Magnetron Head Dimensions
9.85 H x 9.85 W x 16 D in. (250.19 x 250.19 x 406.4 mm)
Power Head Magnetron Head Cooling
Water: 1 GPM, 20-30°C, 71 PSI max
Regulation
Better than 1% of output power (line and load)
Technical Specs
Maximum Plasma Power Output
6.0 kW
Frequency
2,440-2,470 MHz
Ripple
2,440-2,470 MHz
Output Accuracy
<1% closed loop control
Ambient Temperature
Up to 40°C max
Generator to Head Distance
Up to 100 feet max
Microwave Connections
WR284F waveguide with CPR284F flanges
Power Requirements
200-208 VAC, 3 phase, 50/60 Hz
Autotune
<1.5 seconds with <2% reflected power
Chemistries
O2, N2H2, N2, H2O, NH3, H2
Applicator Material
Quartz or Sapphire
Gas Flow Range
1 - 10 slm
Operating Pressure
1 - 10 Torr
Communications
Analog, RS485
Compliance
CE
Configuration
KF40, custom
Cooling
Water: 1 GPM, 20-30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
Power Supply Generator Dimensions
(7U rack) 19 H x 12.2 W x 20.03 D in. (482.6 x 309.88 x 508.76 mm)
Power Head Magnetron Head Dimensions
9.85 H x 9.85 W x 16 D in. (250.19 x 250.19 x 406.4 mm)
Power Head Magnetron Head Cooling
Water: 1 GPM, 20-30°C, 71 PSI max
Regulation
Better than 1% of output power (line and load)
Resources & Downloads
Drawings & CADs
Literature
