HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer
Model: hpq3s-high-pressure-residual-gas-analyzer
HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer
Model: hpq3s-high-pressure-residual-gas-analyzer
Technical Specs
Mass Range
1-100 amu
Filaments
Twin Tungsten or Thoria Coated Iridium
Detector
Faraday
Maximum Analyzer Operating Pressure
0.008 Torr (0.001 mbar) - Application dependent
Minimum Detectable Partial Pressure
8e-11 Torr (1e-10 mbar)
Minimum Detectable Concentration
5ppm at 0.001 Torr (0.0013 mbar)
Software
Built-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software
Mass Stability
±0.1 amu over 8 hours at stable ambient
Resolution
Better than 10% valley for peaks of equal height across mass range
Mounting Flange
DN38CF (70mm/2.75inch OD) Conflat
Bake Out Temperature
250°C with electronics removed
Operating Temperature
Electronics: 10-40°C
Power Requirements
24V DC, 3A external universal voltage supply (included)
Maximum Operating Conditions
80% RH (non condensing)
Data Acquisition Method
Dedicated real time acquisition processor
Data Acquisition Speed
< 3ms per point for analog or barchart scanning
Data Collection Methods
Analog scanning, partial or full mass range 8, 16 or 32 points/amu Barchart scanning, partial or full mass range Peak-jump collection of any combination of peaks at up to 15 per acquisition set
Communication
10/100 Base-T Ethernet, static or automatically assigned IP addresses
Settling Time
< 20ms to 1 ppm of Maximum Signal
Control Method
CE operating system processor with web-server interface
Command Structure
Documented SDK and ASCII command protocols
Filament Protection
Dedicated x-Trip with optional pressure sensor for use with cryo-pump isolation valve.
Number of Stored Source Settings
6 sets including ion source parameters, alignment, resolution, detector calibrations
Compliance
CE (control unit)
Software Controlled Tuning Parameters
Electron energy, 20 to 100eV Emission current, 0 to 2 mA Ion energy, 0 to 10V Ion extraction, 0 to -130V Filter pole bias, 0 to -10V to +10V
Technical Specs
Mass Range
1-100 amu
Filaments
Twin Tungsten or Thoria Coated Iridium
Detector
Faraday
Maximum Analyzer Operating Pressure
0.008 Torr (0.001 mbar) - Application dependent
Minimum Detectable Partial Pressure
8e-11 Torr (1e-10 mbar)
Minimum Detectable Concentration
5ppm at 0.001 Torr (0.0013 mbar)
Software
Built-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software
Mass Stability
±0.1 amu over 8 hours at stable ambient
Resolution
Better than 10% valley for peaks of equal height across mass range
Mounting Flange
DN38CF (70mm/2.75inch OD) Conflat
Bake Out Temperature
250°C with electronics removed
Operating Temperature
Electronics: 10-40°C
Power Requirements
24V DC, 3A external universal voltage supply (included)
Maximum Operating Conditions
80% RH (non condensing)
Data Acquisition Method
Dedicated real time acquisition processor
Data Acquisition Speed
< 3ms per point for analog or barchart scanning
Data Collection Methods
Analog scanning, partial or full mass range 8, 16 or 32 points/amu Barchart scanning, partial or full mass range Peak-jump collection of any combination of peaks at up to 15 per acquisition set
Communication
10/100 Base-T Ethernet, static or automatically assigned IP addresses
Settling Time
< 20ms to 1 ppm of Maximum Signal
Control Method
CE operating system processor with web-server interface
Command Structure
Documented SDK and ASCII command protocols
Filament Protection
Dedicated x-Trip with optional pressure sensor for use with cryo-pump isolation valve.
Number of Stored Source Settings
6 sets including ion source parameters, alignment, resolution, detector calibrations
Compliance
CE (control unit)
Software Controlled Tuning Parameters
Electron energy, 20 to 100eV Emission current, 0 to 2 mA Ion energy, 0 to 10V Ion extraction, 0 to -130V Filter pole bias, 0 to -10V to +10V
Resources & Downloads
Literature
Drawings & CADs