KEINOS™ 2 MHz 5 kW, 11 kW & 13 kW RF Plasma Generators
Model: keinos-rf-plasma-generators
KEINOS™ 2 MHz 5 kW, 11 kW & 13 kW RF Plasma Generators
Model: keinos-rf-plasma-generators
Technical Specs
Type
RF Plasma Generator
Frequency
1.985 MHz
Frequency Tuning Range
±10%
Power Output
5kW, 11kW, 13kW
Accuracy
±5W up to 500W
±1% from 501W to max power
Load Impedance Range
Unlimited
Pulse Frequency
Up to 50KHz
Pulse Rise Time
<5 µsec
Pulse Fall Time
<5 µsec
Minimum Pulse Width
10 µsec
Pulse Energy Repeatability
<3%
Hot Swap or Pulse on the Fly
Available
Pulse Between Two Set Points
Available
Pulse Enabled
Via internal or external TTL trigger, SMA
Pulse Mode
Master or slave operation
Input AC Power
200/208VAC ±10%, 3 Phase, 50/60 Hz
Rated Current
25 amps max (5kW)
55 amps max (13kW)
RF Connector
SQS standard (QC output)
Interface
Ethernet, RS232
Dimensions
5 kW: 5.25 x 17.5 x 24.5 inches
11 kW & 13 kW: 8.30 x 17.8 x 25.5 inches (H x W x D)
Compliance
CE, SEMI S2, SEMI S7, SEMI S14, SEMI F47, CAN/CSA-C22.2 No. 61010-1
Technical Specs
Type
RF Plasma Generator
Frequency
1.985 MHz
Frequency Tuning Range
±10%
Power Output
5kW, 11kW, 13kW
Accuracy
±5W up to 500W
±1% from 501W to max power
Load Impedance Range
Unlimited
Pulse Frequency
Up to 50KHz
Pulse Rise Time
<5 µsec
Pulse Fall Time
<5 µsec
Minimum Pulse Width
10 µsec
Pulse Energy Repeatability
<3%
Hot Swap or Pulse on the Fly
Available
Pulse Between Two Set Points
Available
Pulse Enabled
Via internal or external TTL trigger, SMA
Pulse Mode
Master or slave operation
Input AC Power
200/208VAC ±10%, 3 Phase, 50/60 Hz
Rated Current
25 amps max (5kW)
55 amps max (13kW)
RF Connector
SQS standard (QC output)
Interface
Ethernet, RS232
Dimensions
5 kW: 5.25 x 17.5 x 24.5 inches
11 kW & 13 kW: 8.30 x 17.8 x 25.5 inches (H x W x D)
Compliance
CE, SEMI S2, SEMI S7, SEMI S14, SEMI F47, CAN/CSA-C22.2 No. 61010-1
Resources & Downloads
Drawings & CADs
Literature
