LIQUOZON® VariO3 Dissolved Ozone Delivery System
Model: liquozon-vario3-ozone-water-system
LIQUOZON® VariO3 Dissolved Ozone Delivery System
Model: liquozon-vario3-ozone-water-system
Technical Specs
Type
Ozone Water Delivery System
Ozone Concentration
3-90 ppm
Flow Rate
2-140 lpm
Feed Gas
O2
Dopant Gas
CO2
Wetted Surfaces
Liquid: PFA, PTFE, quartz glass
Gas: 316L stainless steel, PFA, PTFE
Control Interfaces
Binary in/out, RS232/RS485, analog 4 - 20 mA in/out, USB
Dimensions
1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
Weight
315-400 kg, depending on configuration
Compliance
CE, SEMI F47, SEMI S2
Technical Specs
Type
Ozone Water Delivery System
Ozone Concentration
3-90 ppm
Flow Rate
2-140 lpm
Feed Gas
O2
Dopant Gas
CO2
Wetted Surfaces
Liquid: PFA, PTFE, quartz glass
Gas: 316L stainless steel, PFA, PTFE
Control Interfaces
Binary in/out, RS232/RS485, analog 4 - 20 mA in/out, USB
Dimensions
1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
Weight
315-400 kg, depending on configuration
Compliance
CE, SEMI F47, SEMI S2
Resources & Downloads
Literature
Drawings & CADs
