Microvision 2 Flexible, Integration-ready Residual Gas Analyzer

Model: microvision-2-residual-gas-analyzer

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Mass Range
Double: 100, 200, 300 amu
5" Single: 100, 200 amu
Triple: 100, 200, 300 amu
Faraday
1.5 x 10^-11 Torr
Filaments
Tungsten or Thoria coated Iridium
Maximum Analyzer Operating Pressure
7.6 x 10^-5 Torr
Ion Source Sensitivity
2.0 x 10^-4 A/mbar
Minimum Detectable Concentration
3 standard deviations of baseline noise at 300 ms integration
Resolution
Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature
250°C (with extender or electronics removed)

Operating Temperature
200°C Faraday only with electronics 10-40°C 150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar 90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
UHV Out-gassing Rate
< 1.0 x 10^-9 mbar -l/s
Microchannel plate
3.8 x 10^-14 Torr
Single channel EM
7.6 x 10^-15 Torr (triple version)
Mounting Flange
DN 40 CF-F

Mass Range
Double: 100, 200, 300 amu
5" Single: 100, 200 amu
Triple: 100, 200, 300 amu
Faraday
1.5 x 10^-11 Torr
Filaments
Tungsten or Thoria coated Iridium
Maximum Analyzer Operating Pressure
7.6 x 10^-5 Torr
Ion Source Sensitivity
2.0 x 10^-4 A/mbar
Minimum Detectable Concentration
3 standard deviations of baseline noise at 300 ms integration
Resolution
Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature
250°C (with extender or electronics removed)

Operating Temperature
200°C Faraday only with electronics 10-40°C 150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar 90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
UHV Out-gassing Rate
< 1.0 x 10^-9 mbar -l/s
Microchannel plate
3.8 x 10^-14 Torr
Single channel EM
7.6 x 10^-15 Torr (triple version)
Mounting Flange
DN 40 CF-F

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