AX2600 and AX2700 Microwave Plasma Subsystems
Model: microwave-plasma-subsystems
AX2600 and AX2700 Microwave Plasma Subsystems
Model: microwave-plasma-subsystems
Technical Specs
Type
AX2600 & AX2700
Maximum Plasma Power Output
1.8 or 3.0 kW
Frequency
2440 - 2470 MHz
Output Accuracy
±1.5% (from 20 - 100% of max. power)
Power Requirements
200/208 VAC ±10%, 3 phase, 50/60 Hz
Chemistries
O2 , N2 , H2 O, Ar, NF3 , CF4 , C2 F6 , NH3
Applicator Material
Quartz, Sapphire
Operating Pressure
2 - 8 Torr
Communications
Analog, RS485, DeviceNet™ or EtherCAT®
Compliance
CE, ETL, SEMI S2-93A, SEMI F47
Time to Match
< 2 sec
Total Gas Flow
1 - 7 slm
Technical Specs
Type
AX2600 & AX2700
Maximum Plasma Power Output
1.8 or 3.0 kW
Frequency
2440 - 2470 MHz
Output Accuracy
±1.5% (from 20 - 100% of max. power)
Power Requirements
200/208 VAC ±10%, 3 phase, 50/60 Hz
Chemistries
O2 , N2 , H2 O, Ar, NF3 , CF4 , C2 F6 , NH3
Applicator Material
Quartz, Sapphire
Operating Pressure
2 - 8 Torr
Communications
Analog, RS485, DeviceNet™ or EtherCAT®
Compliance
CE, ETL, SEMI S2-93A, SEMI F47
Time to Match
< 2 sec
Total Gas Flow
1 - 7 slm
