O3CS Compact Ozone System
Model: o3cs-ozone-compact-system
O3CS Compact Ozone System
Model: o3cs-ozone-compact-system
Technical Specs
Ozone Output
25-225 g/hr (configuration dependent)
at 25 psi ozone delivery pressure and 17°C cooling water
Ozone Concentration
Up to 20 wt% (300 g/m3) (configuration dependent)
Flow Rate
0.5-20 slm (configuration dependent)
Operating Temperature
20-40°C (68-104°F)
Nominal Cell Pressure (Delivery)
0.7-3.1 bargauge (10-45 psig)
Control Interface
Remote operation, Discrete analog I/O 25 pin D-sub, DeviceNet®, Ethernet Modbus TCP
Voltage Requirements
208 VAC
Current Requirements
Nominal current 2-10A max (configuration dependent)
Frequency
50/60 Hz
Phase
3 phase and GND (no neutral)
Dimensions
482 x 429 x 267 mm (19 x 16.89 x 10.5 in)
Weight
40 kg (88 lb) (approximate - configuration dependent)
Compliance
SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1
Technical Specs
Ozone Output
25-225 g/hr (configuration dependent)
at 25 psi ozone delivery pressure and 17°C cooling water
Ozone Concentration
Up to 20 wt% (300 g/m3) (configuration dependent)
Flow Rate
0.5-20 slm (configuration dependent)
Operating Temperature
20-40°C (68-104°F)
Nominal Cell Pressure (Delivery)
0.7-3.1 bargauge (10-45 psig)
Control Interface
Remote operation, Discrete analog I/O 25 pin D-sub, DeviceNet®, Ethernet Modbus TCP
Voltage Requirements
208 VAC
Current Requirements
Nominal current 2-10A max (configuration dependent)
Frequency
50/60 Hz
Phase
3 phase and GND (no neutral)
Dimensions
482 x 429 x 267 mm (19 x 16.89 x 10.5 in)
Weight
40 kg (88 lb) (approximate - configuration dependent)
Compliance
SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1
Resources & Downloads
Literature
Drawings & CADs
