Mass Flow Meter

5-50000 sccm

0.1-100% of Full Scale (range on mech.)

500 psig

1000 psig

1500 psig

±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale

±0.3% of Reading

0.1% of Full Scale

<0.05% of Full Scale./°C

<0.08% of Reading./°C

<0.02% of Reading/psi

<30 min (to within 0.2% of Full Scale of steady state performance)

10-50°C

0-95% relative humidity, non-condensing

-20° to 80°C (-4° to 149° F)

0-100°C

±2°C

0.1°C

4 digits for value, 4 characters for unit

Compatible with: Swagelok® 4 VCR®, 1.125 in. surface mount (C-seal, W-seal), 1.5 in. W-seal

<1 x 10^-10

316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.

10μ inch average Ra

<2.5 lbs (1.1kg)

CE

+15 to +24 VDC @ 200mA max

15-pin Type “D” Male, 9 pin Type “D” Male

0 to 5 VDC

5 pin microconnnector (DeviceNet)

9 pin Type “D” Male