P9B Pressure-insensitive 5-50,000 sccm Mass Flow Controllers
Model: p9b-mass-flow-controller
P9B Pressure-insensitive 5-50,000 sccm Mass Flow Controllers
Model: p9b-mass-flow-controller
Technical Specs
Full Scale Flow Range
5-50,000 sccm (N2 equivalent)
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10-5000 sccm; 10-40 psid
10000-20000 sccm; 15-40 psid
10000-20000 sccm; 15-40 psid
(N2 Full Scale with atmospheric pressure at the MFC outlet)
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Control Range
2% to 100% of Full Scale
Typical Accuracy
±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
< 0.05% of Full Scale/°C
Span Temperature Coefficient
< 0.08% of Reading/°C
Inlet Pressure Coefficient
< 0.02% of Reading/psi
Typical Settling Time
< 750 msec., typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10° to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
Temperature Display
0 to 100°C
Temperature Accuracy
±2°C
Temperature Resolution
0.1°C
Display
4 digits for value, 4 characters for unit
Pressure Display
0 to 100 psia
Pressure Readout Units
psia, kPA
Pressure Accuracy
1% Full Scale
Pressure Resolution
0.1 psia
External Leak Integrity
< 1 x 10-10 (scc/sec He)
Leak Integrity Through Closed Valve
< 1.0% of Full Scale at 25 psig inlet to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy, KM-45
Valve Seat Material
PTFE (Teflon)
Surface Finish
10µ inch average Ra
Weight
3 lbs (1.4 kg)
Compliance
CE
Attitude Insensitivity
0.25% of Full Scale for indicated zero, span and actual span
Pressure Transient
±5% of set point from 20 to 100% of Full Scale when subject to a 2 psi inlet pressure transient
Technical Specs
Full Scale Flow Range
5-50,000 sccm (N2 equivalent)
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10-5000 sccm; 10-40 psid
10000-20000 sccm; 15-40 psid
10000-20000 sccm; 15-40 psid
(N2 Full Scale with atmospheric pressure at the MFC outlet)
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Control Range
2% to 100% of Full Scale
Typical Accuracy
±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
< 0.05% of Full Scale/°C
Span Temperature Coefficient
< 0.08% of Reading/°C
Inlet Pressure Coefficient
< 0.02% of Reading/psi
Typical Settling Time
< 750 msec., typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10° to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
Temperature Display
0 to 100°C
Temperature Accuracy
±2°C
Temperature Resolution
0.1°C
Display
4 digits for value, 4 characters for unit
Pressure Display
0 to 100 psia
Pressure Readout Units
psia, kPA
Pressure Accuracy
1% Full Scale
Pressure Resolution
0.1 psia
External Leak Integrity
< 1 x 10-10 (scc/sec He)
Leak Integrity Through Closed Valve
< 1.0% of Full Scale at 25 psig inlet to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy, KM-45
Valve Seat Material
PTFE (Teflon)
Surface Finish
10µ inch average Ra
Weight
3 lbs (1.4 kg)
Compliance
CE
Attitude Insensitivity
0.25% of Full Scale for indicated zero, span and actual span
Pressure Transient
±5% of set point from 20 to 100% of Full Scale when subject to a 2 psi inlet pressure transient
Resources & Downloads
Literature
Application Notes
