Paragon® 8.0 slm NF3 Flow Intelligent Remote Plasma Source

Model: paragon-intelligent-remote-plasma-source

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Type
AX7710MKS-01 Remote Plasma Source
Gas Supply During Ignition
100% Ar for ignition only
Gas Supply Post Ignition
Up to 8 slm of NF3 (post ignition NF3 can be added and the Ar removed)
NF3 Operation Reactant Output
>95% dissociation across operating space, 1-10T, 1-8 slm
O2: NF3 Mix Operation Reactant Output
>95% dissociation across operating space, 1-10T, 1-8 slm
Process Gas Feed & Exhaust
Inlet Gas Connection KF40
Outlet Gas Connection KF50
Duty Cycle
2 sec on time minimum to 100% (process times >45 minutes)
Gas Flow
During Ignition: 1 to 8 Torr @ 1 to 5 slm for Ar
Post Ignition: 1 to 10 Torr @ 1 to 8 slm for NF3
Wetted Materials
PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina

Operating Temperature
Ambient air 40°C max.
Cooling Water Required
2.0 gpm, <30°C
Control Interface
EtherCAT and analog I/O 25 pin D
Power Requirements
208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)
Dimensions
18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)
Weight
54 lb. (24.5 Kg)
Compliance
CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1

Type
AX7710MKS-01 Remote Plasma Source
Gas Supply During Ignition
100% Ar for ignition only
Gas Supply Post Ignition
Up to 8 slm of NF3 (post ignition NF3 can be added and the Ar removed)
NF3 Operation Reactant Output
>95% dissociation across operating space, 1-10T, 1-8 slm
O2: NF3 Mix Operation Reactant Output
>95% dissociation across operating space, 1-10T, 1-8 slm
Process Gas Feed & Exhaust
Inlet Gas Connection KF40
Outlet Gas Connection KF50
Duty Cycle
2 sec on time minimum to 100% (process times >45 minutes)
Gas Flow
During Ignition: 1 to 8 Torr @ 1 to 5 slm for Ar
Post Ignition: 1 to 10 Torr @ 1 to 8 slm for NF3
Wetted Materials
PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina

Operating Temperature
Ambient air 40°C max.
Cooling Water Required
2.0 gpm, <30°C
Control Interface
EtherCAT and analog I/O 25 pin D
Power Requirements
208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)
Dimensions
18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)
Weight
54 lb. (24.5 Kg)
Compliance
CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1

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