PDPCA Dual-zone Pressure Controllers with Mass Flow Meter

Model: pdpca-dual-zone-pressure-controller

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Type
Dual Pressure Controller
Pressure Range
20, 50, or 100 Torr, Full Scale
Fitting Type
Swagelok® 4 VCR® male compatible
Pressure Control Accuracy
±1.0% set point1
Transducer Over Pressure Limit
45 psia or 200% Full Scale, whichever is greater
Pressure Measurement Accuracy
±0.5% Reading
Zero Temperature Coefficient
Pressure: <0.02% Full Scale/°C
Flow: <0.05% Full Scale/°C
Span Temperature Coefficient
Pressure: <0.04% Reading/°C
Flow: <0.08% Reading/°C
Control Range
10-100% Full Scale
Typical Response Time
<2.0 seconds to set point, typical - dependent on system configuration and control settings
Operating Temperature
15-50°C (59-122°F)
Storage Temperature
-20 to 80°C (-4 to 176°F)
Storage Humidity
0-95% Relative Humidity, non-condensing
External Leak Integrity
<10^-9 scc/sec He
Leak Integrity Through Closed Valve
<1% Full Scale
Flow Measurement Range
20, 50 or 100 sccm, Full Scale
Maximum Inlet Pressure
45 psia

Flow Accuracy
±1.0% Full Scale
Wetted Materials
316L Stainless Steel, Inconel®, Nickel, Elgiloy®, Viton®
Surface Finish
Ra <10 µinches, electropolished
Input Power
EtherCAT: +24 VDC (<5 watts)
DeviceNet: +11 to 25 VDC (<4 watts), each channel
Connector
EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
DeviceNet: M8, 5 pin micro connector (Power and Communications), each channel
Data Rate Switch
EtherCAT: No switch
DeviceNet: 4 positions: 125, 250, 500K (Default), Programmable over network.
EtherCAT Communication Rate
100 Mbps
DeviceNet Communication Rate
N/A
MAC ID Switches
EtherCAT: 3 switches, 16 positions
DeviceNet: 2 switches, 10 positions: 0,0 to 6,3. 1 to 254
Network Size
EtherCAT: Up to 4095 nodes
DeviceNet: Up to 64 nodes
Indicators
EtherCAT: Up to 4095 nodes
DeviceNet: LED Network (green/red); LED Module (green/red)
Meter Warm-up Time
1 hour
Stability at set point
<0.1% set point
Weight
10.5 lbs. (4.8 Kg)
Dimensions
10.46 (incl. fittings) x 3.36 x 5.35 in.
26.56 (incl. fittings) x 8.53 x 13.59 cm

Type
Dual Pressure Controller
Pressure Range
20, 50, or 100 Torr, Full Scale
Fitting Type
Swagelok® 4 VCR® male compatible
Pressure Control Accuracy
±1.0% set point1
Transducer Over Pressure Limit
45 psia or 200% Full Scale, whichever is greater
Pressure Measurement Accuracy
±0.5% Reading
Zero Temperature Coefficient
Pressure: <0.02% Full Scale/°C
Flow: <0.05% Full Scale/°C
Span Temperature Coefficient
Pressure: <0.04% Reading/°C
Flow: <0.08% Reading/°C
Control Range
10-100% Full Scale
Typical Response Time
<2.0 seconds to set point, typical - dependent on system configuration and control settings
Operating Temperature
15-50°C (59-122°F)
Storage Temperature
-20 to 80°C (-4 to 176°F)
Storage Humidity
0-95% Relative Humidity, non-condensing
External Leak Integrity
<10^-9 scc/sec He
Leak Integrity Through Closed Valve
<1% Full Scale
Flow Measurement Range
20, 50 or 100 sccm, Full Scale
Maximum Inlet Pressure
45 psia

Flow Accuracy
±1.0% Full Scale
Wetted Materials
316L Stainless Steel, Inconel®, Nickel, Elgiloy®, Viton®
Surface Finish
Ra <10 µinches, electropolished
Input Power
EtherCAT: +24 VDC (<5 watts)
DeviceNet: +11 to 25 VDC (<4 watts), each channel
Connector
EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
DeviceNet: M8, 5 pin micro connector (Power and Communications), each channel
Data Rate Switch
EtherCAT: No switch
DeviceNet: 4 positions: 125, 250, 500K (Default), Programmable over network.
EtherCAT Communication Rate
100 Mbps
DeviceNet Communication Rate
N/A
MAC ID Switches
EtherCAT: 3 switches, 16 positions
DeviceNet: 2 switches, 10 positions: 0,0 to 6,3. 1 to 254
Network Size
EtherCAT: Up to 4095 nodes
DeviceNet: Up to 64 nodes
Indicators
EtherCAT: Up to 4095 nodes
DeviceNet: LED Network (green/red); LED Module (green/red)
Meter Warm-up Time
1 hour
Stability at set point
<0.1% set point
Weight
10.5 lbs. (4.8 Kg)
Dimensions
10.46 (incl. fittings) x 3.36 x 5.35 in.
26.56 (incl. fittings) x 8.53 x 13.59 cm

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