Process Sense™ NDIR Endpoint Detector for Chamber Clean
Model: process-sense-clean-endpoint-sensor
Process Sense™ NDIR Endpoint Detector for Chamber Clean
Model: process-sense-clean-endpoint-sensor
Technical Specs
Type
Process Sense™ NDIR
Measurement Technique
NDIR
Measurement Range
SiF4: 1-200 ppm (at 760 Torr)
Detection Limit
1 ppm SiF4 (at 760 Torr)
Response Time
1 second report rate
Calibration Accuracy
±10%
Electrical Connector
DB25 (DB15 adapter available)
Power Requirements
24 VDC (2 amp)
Dimensions
38 x 12 x 13 cm (15 x 4.5 x 5 inches)
Weight
2.5 kg (5.5 lbs)
Analog Output
Analog 1 (AO1): 0-10 V (1x SiF4 concentration)
Analog 2 (AO2): 0-10 V (20x SiF4 concentration)
Digital Output
Fault signals
Sample Pressure
1-760 Torr
Sample Temperature
25-60°C
Fittings
NW25, NW40, NW50 (others available upon request)
Technical Specs
Type
Process Sense™ NDIR
Measurement Technique
NDIR
Measurement Range
SiF4: 1-200 ppm (at 760 Torr)
Detection Limit
1 ppm SiF4 (at 760 Torr)
Response Time
1 second report rate
Calibration Accuracy
±10%
Electrical Connector
DB25 (DB15 adapter available)
Power Requirements
24 VDC (2 amp)
Dimensions
38 x 12 x 13 cm (15 x 4.5 x 5 inches)
Weight
2.5 kg (5.5 lbs)
Analog Output
Analog 1 (AO1): 0-10 V (1x SiF4 concentration)
Analog 2 (AO2): 0-10 V (20x SiF4 concentration)
Digital Output
Fault signals
Sample Pressure
1-760 Torr
Sample Temperature
25-60°C
Fittings
NW25, NW40, NW50 (others available upon request)
Resources & Downloads
Literature
Application Notes
Drawings & CADs
Technical Notes
