R*evolution® Remote Plasma Source
Model: r-evolution-5-remote-rf-plasma-source
R*evolution® Remote Plasma Source
Model: r-evolution-5-remote-rf-plasma-source
Technical Specs
Type
AX7696MKS-01 Remote Plasma Source
Ignition Gas Supply
In process gas
Process Gas Supply
up to 10 SLM ( 9:1 O2: N2)
Operating Pressure
0.5 to 4 torr
Duty Cycle
100%
Interlocks
Internal thermal switch and internal water flow switch to protect against insufficient cooling
Wetted Materials
6061-T6 Aluminum, Kalrez®, SiO2, 316L SS, Fluorosilicone
Control Interface
Analog, EtherCAT
Power Requirements
208 VAC, 50/60 Hz, 30A, 3 phase
Cooling Water
1.75 gpm, <30°C Ambient 40°C max.
Dimensions
15.7 x 13.7 x 12.14 inches (399mm x 348mm x 308mm nominal)
Weight
81 lb. (38.6 Kg)
Compliance
CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1
Technical Specs
Type
AX7696MKS-01 Remote Plasma Source
Ignition Gas Supply
In process gas
Process Gas Supply
up to 10 SLM ( 9:1 O2: N2)
Operating Pressure
0.5 to 4 torr
Duty Cycle
100%
Interlocks
Internal thermal switch and internal water flow switch to protect against insufficient cooling
Wetted Materials
6061-T6 Aluminum, Kalrez®, SiO2, 316L SS, Fluorosilicone
Control Interface
Analog, EtherCAT
Power Requirements
208 VAC, 50/60 Hz, 30A, 3 phase
Cooling Water
1.75 gpm, <30°C Ambient 40°C max.
Dimensions
15.7 x 13.7 x 12.14 inches (399mm x 348mm x 308mm nominal)
Weight
81 lb. (38.6 Kg)
Compliance
CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1
Resources & Downloads
Literature
Drawings & CADs
