R-Series Vacuum Gate Valve
Model: r-series-gate-valves
R-Series Vacuum Gate Valve
Model: r-series-gate-valves
Technical Specs
Type
R-Series Gate Valve
Seal Material
Standard: Viton® (FKM)
Optional: Chemraz®, Kalrez® compounds
Actuation
Double acting pneumatic or manual
Actuation Time
< 2 sec
Actuator Temperature
10 to 80°C
Limit Switch
Magnetic Reed Switch: Current rating < 80mA
Pressure Range
1*10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar)
Actuator Seal
Elastomer shaft seal
Solenoid Temperature
10 to 50°C
Body Temperature
Viton Seals: 10°C to 105°C
Optional Seals: 10°C to 150°C
Pneumatic Pressure
5.4 ±1.3 atm (80 ±20 psig)
Side to Side Leak Rate
1*10-9 atm*cc/sec
External Leak Rate
1*10-9 atm*cc/sec
Max Delta Pressure - Operating
<22.5 Torr (30 mbar) chamber side high*
<22.5 Torr (30 mbar) pump side high
*Valve is operable up to 760 Torr (1 bar) chamber side high, but cycle life will be reduced with operation >30 mbar.
Max Delta Pressure - Closed
1.6 atm, either direction
Exposed Materials
Stainless Steel: 304L SS, 316L SS, 440C SS, Krytox LVP
Aluminum: 6061 AL, 304L SS, 316L SS, 440C SS, Krytox LVP
Maintenance
DN80: 200,000 cycles before maintenance
DN100: 200,000 cycles before maintenance
DN160: 100,000 cycles before maintenance
MTTR: 15 minutes; Can be serviced without removal from vacuum system
Technical Specs
Type
R-Series Gate Valve
Seal Material
Standard: Viton® (FKM)
Optional: Chemraz®, Kalrez® compounds
Actuation
Double acting pneumatic or manual
Actuation Time
< 2 sec
Actuator Temperature
10 to 80°C
Limit Switch
Magnetic Reed Switch: Current rating < 80mA
Pressure Range
1*10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar)
Actuator Seal
Elastomer shaft seal
Solenoid Temperature
10 to 50°C
Body Temperature
Viton Seals: 10°C to 105°C
Optional Seals: 10°C to 150°C
Pneumatic Pressure
5.4 ±1.3 atm (80 ±20 psig)
Side to Side Leak Rate
1*10-9 atm*cc/sec
External Leak Rate
1*10-9 atm*cc/sec
Max Delta Pressure - Operating
<22.5 Torr (30 mbar) chamber side high*
<22.5 Torr (30 mbar) pump side high
*Valve is operable up to 760 Torr (1 bar) chamber side high, but cycle life will be reduced with operation >30 mbar.
Max Delta Pressure - Closed
1.6 atm, either direction
Exposed Materials
Stainless Steel: 304L SS, 316L SS, 440C SS, Krytox LVP
Aluminum: 6061 AL, 304L SS, 316L SS, 440C SS, Krytox LVP
Maintenance
DN80: 200,000 cycles before maintenance
DN100: 200,000 cycles before maintenance
DN160: 100,000 cycles before maintenance
MTTR: 15 minutes; Can be serviced without removal from vacuum system
Resources & Downloads
Literature
Drawings & CADs
