RPS-CH24P1 Remote Plasma Source for High Flow Applications
Model: rps-ch24p1-remote-plasma-source
RPS-CH24P1 Remote Plasma Source for High Flow Applications
Model: rps-ch24p1-remote-plasma-source
Technical Specs
Type
RPS-CH24P1 Remote Plasma Source
Power Output
24 kW
RF Frequency
400 kHz
Accuracy
±1% to power set point
Gas Supply During Ignition
Ar
NF3 Operation Reactant Output
1-25 slm 20T
Compatible Species
NF3, O2, N2, Ar
Mixed Species Space
30-90 slm
THD
<15%
Inlet Gas Connection
KF40
Outlet Gas Connection
KF50
Cooling Water Required
Remote Head: 3 gpm (11.36 Lpm)
DC Power Supply: 2 gpm (7.57 Lpm)
Control Interface
Analog: DB25
Digital: EtherCAT
Power Requirements
208 V, 3 phase 50/60 Hz, 75 Amps RMS max phase
Dimensions
Remote Head: 22.02 x 10.76 x 11.1 in. (55.93 x 27.33 x 28.19 cm)
Power Supply: 21.24 x 19.00 x 7.0 in. (53.95 x 48.26 x 17.78 cm)
Weight
Remote Head: 100 lbs. (45.36 kg)
Power Supply: 62 lbs. (28.12 kg)
Compliance
SEMI F47
Technical Specs
Type
RPS-CH24P1 Remote Plasma Source
Power Output
24 kW
RF Frequency
400 kHz
Accuracy
±1% to power set point
Gas Supply During Ignition
Ar
NF3 Operation Reactant Output
1-25 slm 20T
Compatible Species
NF3, O2, N2, Ar
Mixed Species Space
30-90 slm
THD
<15%
Inlet Gas Connection
KF40
Outlet Gas Connection
KF50
Cooling Water Required
Remote Head: 3 gpm (11.36 Lpm)
DC Power Supply: 2 gpm (7.57 Lpm)
Control Interface
Analog: DB25
Digital: EtherCAT
Power Requirements
208 V, 3 phase 50/60 Hz, 75 Amps RMS max phase
Dimensions
Remote Head: 22.02 x 10.76 x 11.1 in. (55.93 x 27.33 x 28.19 cm)
Power Supply: 21.24 x 19.00 x 7.0 in. (53.95 x 48.26 x 17.78 cm)
Weight
Remote Head: 100 lbs. (45.36 kg)
Power Supply: 62 lbs. (28.12 kg)
Compliance
SEMI F47
