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  5. RPS-CM12P1 Remote Plasma Source for ALD, CVD and PVD Chambers

RPS-CM12P1 Remote Plasma Source for ALD, CVD and PVD Chambers

Model: rps-cm12p1-remote-plasma-source

RPS-CM12P1 Remote Plasma Source for ALD, CVD and PVD Chambers

Model: rps-cm12p1-remote-plasma-source

RPS-CM12P1 Remote Plasma Source for ALD, CVD and PVD Chambers

Technical Specs

  • Type
    RPS-CM12P1 Remote Plasma Source
  • Power Output
    12 kW, 3 phase 50/60 Hz, 40 Amps RMS max phase
  • RF Frequency
    400 kHz
  • Accuracy
    ±1% to power set point
  • Gas Supply During Ignition
    Ar
  • NF3 Process Gas
    1-12 slm, 1-10 T
  • NF3 Operation Reactant Output
    1-12 slm
  • Mixed Species Space
    30-60 slm
  • THD
    >15%
  • Inlet Gas Connection
    KF40
  • Outlet Gas Connection
    KF50 or KF40
  • Control Interface
    Analog: DB25
    Digital: EtherCAT
  • Dimensions
    18.4 x 9.5 x 10.5 in. (46.73 x 24.13 x 26.67cm)
  • Weight
    73 lbs. (33.11 kg)
  • Compliance
    SEMI F47

Technical Specs

  • Type
    RPS-CM12P1 Remote Plasma Source
  • Power Output
    12 kW, 3 phase 50/60 Hz, 40 Amps RMS max phase
  • RF Frequency
    400 kHz
  • Accuracy
    ±1% to power set point
  • Gas Supply During Ignition
    Ar
  • NF3 Process Gas
    1-12 slm, 1-10 T
  • NF3 Operation Reactant Output
    1-12 slm
  • Mixed Species Space
    30-60 slm
  • THD
    >15%
  • Inlet Gas Connection
    KF40
  • Outlet Gas Connection
    KF50 or KF40
  • Control Interface
    Analog: DB25
    Digital: EtherCAT
  • Dimensions
    18.4 x 9.5 x 10.5 in. (46.73 x 24.13 x 26.67cm)
  • Weight
    73 lbs. (33.11 kg)
  • Compliance
    SEMI F47

Resources & Downloads

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