AX8580 Fully Integrated Modular Ozone Delivery System
Model: AX8580-modular-ozone-delivery-system
AX8580 Fully Integrated Modular Ozone Delivery System
Model: AX8580-modular-ozone-delivery-system
Technical Specs
Type
Ozone Gas Delivery System
Ozone Output
>400g/Nm3
Flow Rate
2.5 gpm per generator
Feed Gas
Oxygen, Nitrogen
Feed Gas Supply Pressure
70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm2) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm2) maximum N2 pressure 10 psi higher than O2 pressure
Feed Gas Purity
99.9995% minimum
Operating Temperature
5 - 40°C (41 - 104°F)
Cooling Water Temperature Required
5 - 17°C
Cooling Water Filtration Required
100 microns
Cooling Water Quality Required
1 - 3 MΩcm DI
Cooling Water Minimum Flow Required
2.5 gpm per generator
Cooling Water Connections Required
1 in. compression (Swagelok®)
Cooling Water Heat Load Required
5 kw per generator
Voltage Requirements
208 volts AC (±10%), three phase
Current Requirements
65 Amps max (fully populated system)
Frequency
50/60 Hz
Exhaust Flow Rate
Two-generator system requires 125 CFM (3.5m3/min), Four-generator system requires 250 CFM (7m3/min), Static Pressure 125CFM (3.5m3/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m3/min)
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
Control Air Pressure
70 - 100 psig (483 - 689 kPa)
Control Air Type
CDA or dry nitrogen, 40µ filtered
Control Air Fitting
0.25 in. compression (Swagelok®)
Exhaust Connection
6 in. diameter duct opening standard
Dimensions
26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
Compliance
ETL 9700614, SEMI S2-0715
Altitude
Up to 1000 m (3280 ft) above mean sea level
Technical Specs
Type
Ozone Gas Delivery System
Ozone Output
>400g/Nm3
Flow Rate
2.5 gpm per generator
Feed Gas
Oxygen, Nitrogen
Feed Gas Supply Pressure
70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm2) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm2) maximum N2 pressure 10 psi higher than O2 pressure
Feed Gas Purity
99.9995% minimum
Operating Temperature
5 - 40°C (41 - 104°F)
Cooling Water Temperature Required
5 - 17°C
Cooling Water Filtration Required
100 microns
Cooling Water Quality Required
1 - 3 MΩcm DI
Cooling Water Minimum Flow Required
2.5 gpm per generator
Cooling Water Connections Required
1 in. compression (Swagelok®)
Cooling Water Heat Load Required
5 kw per generator
Voltage Requirements
208 volts AC (±10%), three phase
Current Requirements
65 Amps max (fully populated system)
Frequency
50/60 Hz
Exhaust Flow Rate
Two-generator system requires 125 CFM (3.5m3/min), Four-generator system requires 250 CFM (7m3/min), Static Pressure 125CFM (3.5m3/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m3/min)
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
Control Air Pressure
70 - 100 psig (483 - 689 kPa)
Control Air Type
CDA or dry nitrogen, 40µ filtered
Control Air Fitting
0.25 in. compression (Swagelok®)
Exhaust Connection
6 in. diameter duct opening standard
Dimensions
26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
Compliance
ETL 9700614, SEMI S2-0715
Altitude
Up to 1000 m (3280 ft) above mean sea level
Resources & Downloads
Literature
Drawings & CADs
