AX8585 Stand-Alone High Concentration Ozone Delivery System
Model: semozon-stand-alone-ozone-delivery-system
AX8585 Stand-Alone High Concentration Ozone Delivery System
Model: semozon-stand-alone-ozone-delivery-system
Technical Specs
Type
Ozone Gas Delivery System
Ozone Output
375g/Nm3
Flow Rate
22.7 lpm (6.0 gpm) per generator
Feed Gas
Oxygen, Nitrogen (100 - 1000 ppm of total flow)
Feed Gas Supply Pressure
O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm2), N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm2)
Feed Gas Purity
Oxygen: Grade 6 or better O2, Nitrogen: Grade 5 or better N2
Operating Temperature
5 - 40°C (41 - 104°F)
Cooling Water Temperature Required
5 - 25°C (41 - 77°F)
Cooling Water Filtration Required
100 microns
Cooling Water Quality Required
3 - 0.5 MΩcm DI
Cooling Water Minimum Flow Required
22.7 lpm (6.0 gpm) per generator (configuration dependent)
Cooling Water Connections Required
1 in. compression (Swagelok®)
Cooling Water Heat Load Required
11 kw per generator
Voltage Requirements
208 volts AC (±10%), three phase
Frequency
50/60 Hz
Exhaust Flow Rate
70.8 l/s (150 cfm) per generator
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
3.05 mm (0.16 in) H2O minimum, measured at duct entrance to cabinet
Control Air Pressure
70 - 100 psig (483 - 689 kPa)
Control Air Type
CDA or dry nitrogen, 40µ filtered
Control Air Fitting
0.25 in. compression (Swagelok®)
Exhaust Connection
8 in. diameter duct opening
Dimensions
28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
345 kg (760 lb) for system with one generator
Compliance
CE, UL/CSA, SEMI S2, SEMI F47
Altitude
Up to 1000 m (3280 ft) above mean sea level
Technical Specs
Type
Ozone Gas Delivery System
Ozone Output
375g/Nm3
Flow Rate
22.7 lpm (6.0 gpm) per generator
Feed Gas
Oxygen, Nitrogen (100 - 1000 ppm of total flow)
Feed Gas Supply Pressure
O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm2), N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm2)
Feed Gas Purity
Oxygen: Grade 6 or better O2, Nitrogen: Grade 5 or better N2
Operating Temperature
5 - 40°C (41 - 104°F)
Cooling Water Temperature Required
5 - 25°C (41 - 77°F)
Cooling Water Filtration Required
100 microns
Cooling Water Quality Required
3 - 0.5 MΩcm DI
Cooling Water Minimum Flow Required
22.7 lpm (6.0 gpm) per generator (configuration dependent)
Cooling Water Connections Required
1 in. compression (Swagelok®)
Cooling Water Heat Load Required
11 kw per generator
Voltage Requirements
208 volts AC (±10%), three phase
Frequency
50/60 Hz
Exhaust Flow Rate
70.8 l/s (150 cfm) per generator
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
3.05 mm (0.16 in) H2O minimum, measured at duct entrance to cabinet
Control Air Pressure
70 - 100 psig (483 - 689 kPa)
Control Air Type
CDA or dry nitrogen, 40µ filtered
Control Air Fitting
0.25 in. compression (Swagelok®)
Exhaust Connection
8 in. diameter duct opening
Dimensions
28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
345 kg (760 lb) for system with one generator
Compliance
CE, UL/CSA, SEMI S2, SEMI F47
Altitude
Up to 1000 m (3280 ft) above mean sea level
Resources & Downloads
Literature
Drawings & CADs
