AX8415 Ultra High Concentration, High Flow Ozone Generator
Model: AX8415-ultra-clean-ozone-generator
AX8415 Ultra High Concentration, High Flow Ozone Generator
Model: AX8415-ultra-clean-ozone-generator
Technical Specs
Type
Ozone Gas Generator
Ozone Output
up to 425 g/Nm3
Flow Rate
2.5 - 50 slm
Feed Gas
Oxygen: Grade 6 or better O2
Nitrogen (Optional): 100 ppm Grade 5 or better N2
Ambient Temperature
10 - 40°C (50 - 104°F)
Nominal Cell Pressure (Delivery)
15 - 45 psig (100 - 310 kPa)
Pressure
Maintain process pressure at 20 - 50 psig
Control Interface
Front panel control and remote operation
Cooling Water Temperature
5 - 25°C (41 - 77°F)
Cooling Water Filtration
100 microns
Cooling Water Quality
Resistivity ≥ 50 kΩ/cm
Minimum Water Flow
9.4 lpm (2.5 gpm)
Voltage Requirements
208 VAC (±10%) 3Ø & GND, no neutral
Current Requirements
20 Amp
Frequency
50/60 Hz
Weight
46.3 kg (102 lbs)
Dimensions
483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in)
Compliance
CE, SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1
Technical Specs
Type
Ozone Gas Generator
Ozone Output
up to 425 g/Nm3
Flow Rate
2.5 - 50 slm
Feed Gas
Oxygen: Grade 6 or better O2
Nitrogen (Optional): 100 ppm Grade 5 or better N2
Ambient Temperature
10 - 40°C (50 - 104°F)
Nominal Cell Pressure (Delivery)
15 - 45 psig (100 - 310 kPa)
Pressure
Maintain process pressure at 20 - 50 psig
Control Interface
Front panel control and remote operation
Cooling Water Temperature
5 - 25°C (41 - 77°F)
Cooling Water Filtration
100 microns
Cooling Water Quality
Resistivity ≥ 50 kΩ/cm
Minimum Water Flow
9.4 lpm (2.5 gpm)
Voltage Requirements
208 VAC (±10%) 3Ø & GND, no neutral
Current Requirements
20 Amp
Frequency
50/60 Hz
Weight
46.3 kg (102 lbs)
Dimensions
483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in)
Compliance
CE, SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1
Resources & Downloads
Literature
Drawings & CADs
Application Notes
Technical Papers
