1-100, 1-200, or 1-300 amu

High conductance closed ion source

Independently replaceable twin Tungsten or Thoria filaments

Double filter (1-inch "RF only" pre-filter with 4-inch main filter)

Dual (Faraday and secondary electron multiplier)

1e-3 Torr at the ion source inlet (standard), higher pressure optional

<2e-12 Torr (for total pressures <1e-4 Torr on baseline inlet)

<200 ppb of rated inlet pressure for non-interfering species

Better than ±0.1 amu over 8 hours

Better than 10% valley between peaks of equal height throughout the mass range

Maximum inlet pressure can be chosen in the range of 10 mTorr to 10 Torr

Maximum inlet pressure can be chosen in the range of 100 mTorr to 760 Torr. Please consult the factory for the exact range value closest to your desired pressure. *Inlets for <10 Torr can have optional gas flow acceleration.

DN35CF (70mm/2.75'' OD) Conflat® flange. Custom adapters can be provided

67 l/s turbomolecular pump with high conductance analyzer housing, inlet system, modular UniBloc inlet, automated vacuum control (RVC), completely interlocked and integrated

Standard: Connected to the tool foreline pump via surge protect assembly with a KF16 fitting
Optional: Independent, chemically resistant, dry diaphragm pump with KF16 fitting for connecting the exhaust to a suitable scrubber system

Better than 5e-9 Torr after bakeout

Included for 180°C bakeout of analyzer chamber

70°C (controlled to ±1°C)

33 lbs. (15 kg) to bolt on process system

Optional stands and brackets are available

Optional RGA trolley to improve versatility (footprint 18x24 in., 455x604 mm)

60-80 psig CDA

1.7 kg

88-264 VAC, 47/63 Hz, 600 Watts

Electronics: 10-40°C, 80% RH (non-condensing)

Interlock status, filament emission, SEM, power and communications

4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control

Leak check headset socket, external filament trip socket, instrument reset

Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® 7, Server 2016 or Windows 10*

Ethernet, CAT-5e

Intel® i5 3.1Ghz or AMD Ryzen 5 4.4Ghz, 8GB RAM, 512 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.

Process Eye Professional client/server configuration offers flexible multi-sensor operation.

33 ft. (10 m) standard RGA and 10 ft. (3m) with mobile RGA platform. Other lengths available dependent upon process system and customer requirements

132 lbs (60 Kg) may vary depending upon backing pump and instrument rack requirements

CE, UKCA