Vision 2000-B™ Vacuum Baseline RGA for Process Tools
Model: vision-2000-b-rga-vacuum-baseline-monitor
Vision 2000-B™ Vacuum Baseline RGA for Process Tools
Model: vision-2000-b-rga-vacuum-baseline-monitor
Technical Specs
Mass Range
1-100, 1-200, or 1-300 amu
Ion Source
Open ion source
Filaments
Replaceable twin Tungsten or Thoria filaments
Mass Filter
Double filter (1 inch RF only pre-filter with 4 inch main filter)
Detector
Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure
7.6e-5 Torr (1e-4 mbar)
Minimum Detectable Concentration
Faraday: 2e-11 Torr (2.7e-11 mbar)
Secondary electron multiplier: 5e-14 Torr (6.7e-14 mbar)
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange
DN35CF (70mm/2.75inch OD) Conflat® flange
Vacuum Hardware
Analyzer housing plus pneumatic isolation valve. Optional independent total pressure gauge and/or valve and filament trip-box assemblies available for interlocked protection of the RGA.
Operating Temperature
Electronics: 10-40°C
Weight
Control Module: 1.7 kg
Pneumatics
60-80 psig CDA
Power Requirements
24 VDC, 3.4A, external supply (included), 100-120V/200-240V, 2.1 Amp, 47-63 Hz
LED Status Indication
Interlock status, emission OK, SEM, power and communications
I/O Capability
4 analog inputs (-11 to +11v, 22 bit)
2 analog outputs (0-10V, 12 bit)
16 digital TTL I/O
1 opto-isolated filament control input
1 dedicated gauge port
Other Facilities
Leak check headset socket, external filament trip and instrument reset
Software
Process Eye® Professional fully network compatible control platform generating under Microsoft® Windows® 2000, xP* or Vista* (*recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1024 MB RAM, 120 GB disk free space drive. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor
Multi-Sensor Process Eye Professional client/server configuration offers flexible multi-sensor operation
Shipping Weight
25 lbs (11.4 Kg)
Compliance
CE (control unit)
Technical Specs
Mass Range
1-100, 1-200, or 1-300 amu
Ion Source
Open ion source
Filaments
Replaceable twin Tungsten or Thoria filaments
Mass Filter
Double filter (1 inch RF only pre-filter with 4 inch main filter)
Detector
Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure
7.6e-5 Torr (1e-4 mbar)
Minimum Detectable Concentration
Faraday: 2e-11 Torr (2.7e-11 mbar)
Secondary electron multiplier: 5e-14 Torr (6.7e-14 mbar)
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange
DN35CF (70mm/2.75inch OD) Conflat® flange
Vacuum Hardware
Analyzer housing plus pneumatic isolation valve. Optional independent total pressure gauge and/or valve and filament trip-box assemblies available for interlocked protection of the RGA.
Operating Temperature
Electronics: 10-40°C
Weight
Control Module: 1.7 kg
Pneumatics
60-80 psig CDA
Power Requirements
24 VDC, 3.4A, external supply (included), 100-120V/200-240V, 2.1 Amp, 47-63 Hz
LED Status Indication
Interlock status, emission OK, SEM, power and communications
I/O Capability
4 analog inputs (-11 to +11v, 22 bit)
2 analog outputs (0-10V, 12 bit)
16 digital TTL I/O
1 opto-isolated filament control input
1 dedicated gauge port
Other Facilities
Leak check headset socket, external filament trip and instrument reset
Software
Process Eye® Professional fully network compatible control platform generating under Microsoft® Windows® 2000, xP* or Vista* (*recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1024 MB RAM, 120 GB disk free space drive. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor
Multi-Sensor Process Eye Professional client/server configuration offers flexible multi-sensor operation
Shipping Weight
25 lbs (11.4 Kg)
Compliance
CE (control unit)
