Vision 2000-C™ & E™ RGAs for Multi-pressure & CVD/ALD Processes
Model: vision-2000-c-e-rga-cvd-ald-applications
Vision 2000-C™ & E™ RGAs for Multi-pressure & CVD/ALD Processes
Model: vision-2000-c-e-rga-cvd-ald-applications
Technical Specs
Mass Range
Vision 2000-C: 1-300 amu
Vision 2000-E: 1-200 amu
Ion Source
High conductance closed ion source
Filaments
Independently replaceable twin Tungsten filaments
Mass Filter
Double filter (1-inch "RF only" pre-filter with 4-inch main filter)
Detector
Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure
1e-3 Torr at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure
<2e-11 Torr (for total pressures <1e-4 Torr on baseline inlet)
Minimum Detectable Concentration
<200 ppb of highest pressure gas for non-interfering species
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Base Pressure Range
Ion source at maximum pressure at 1 mTorr, 10 mTorr or 100 mTorr
Process Pressure Range
Ion source at maximum pressure at 10 mTorr, 100 mTorr, 500 mTorr, 1.5 Torr, 5 Torr, 10 Torr, 40 Torr, 100 Torr or 700 Torr
Mounting Flange
DN35CF (70mm/2.75 inches OD) Conflat® flange. Custom adapters can be provided.
Vacuum Hardware
60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, UniBloc™ inlet, automated vacuum control (RVC) completely interlocked and integrated
Backing Vacuum System
Standard: Connected to the tool foreline pump via Surge Protect assembly with a KF16 fitting
Optional: Independent chemically resistant, dry diaphragm pump with KF16 fitting for connecting the exhaust to a suitable scrubber system
Operating Temperature
Electronics: 10-40°C
Weight
Control Module: 1.7 kg
Mechanical Support
Optional stands and brackets are available
Mobile RGA Platform
Optional RGA trolley to improve versatility (footprint 18x24 inches, 455x604mm)
Pneumatics
60-80 psig CDA
Power Requirements
88-264 VAC, 47/63 Hz, 600 Watts
Maximum Operating Conditions
80% RH (non condensing)
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Other Facilities
Leak check headset socket, external filament trip socket, instrument reset
Software
Process Eye® Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® xP, Vista, Server 2008 or Windows 7* (*recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor
Process Eye Professional client/server configuration offers flexible multi-sensor operation.
Shipping Weight
44 lbs (20 Kg)
Compliance
CE (control unit)
Technical Specs
Mass Range
Vision 2000-C: 1-300 amu
Vision 2000-E: 1-200 amu
Ion Source
High conductance closed ion source
Filaments
Independently replaceable twin Tungsten filaments
Mass Filter
Double filter (1-inch "RF only" pre-filter with 4-inch main filter)
Detector
Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure
1e-3 Torr at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure
<2e-11 Torr (for total pressures <1e-4 Torr on baseline inlet)
Minimum Detectable Concentration
<200 ppb of highest pressure gas for non-interfering species
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Base Pressure Range
Ion source at maximum pressure at 1 mTorr, 10 mTorr or 100 mTorr
Process Pressure Range
Ion source at maximum pressure at 10 mTorr, 100 mTorr, 500 mTorr, 1.5 Torr, 5 Torr, 10 Torr, 40 Torr, 100 Torr or 700 Torr
Mounting Flange
DN35CF (70mm/2.75 inches OD) Conflat® flange. Custom adapters can be provided.
Vacuum Hardware
60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, UniBloc™ inlet, automated vacuum control (RVC) completely interlocked and integrated
Backing Vacuum System
Standard: Connected to the tool foreline pump via Surge Protect assembly with a KF16 fitting
Optional: Independent chemically resistant, dry diaphragm pump with KF16 fitting for connecting the exhaust to a suitable scrubber system
Operating Temperature
Electronics: 10-40°C
Weight
Control Module: 1.7 kg
Mechanical Support
Optional stands and brackets are available
Mobile RGA Platform
Optional RGA trolley to improve versatility (footprint 18x24 inches, 455x604mm)
Pneumatics
60-80 psig CDA
Power Requirements
88-264 VAC, 47/63 Hz, 600 Watts
Maximum Operating Conditions
80% RH (non condensing)
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Other Facilities
Leak check headset socket, external filament trip socket, instrument reset
Software
Process Eye® Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® xP, Vista, Server 2008 or Windows 7* (*recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor
Process Eye Professional client/server configuration offers flexible multi-sensor operation.
Shipping Weight
44 lbs (20 Kg)
Compliance
CE (control unit)
Resources & Downloads
Drawings & CADs
Literature
