Vision 2000-P™ RGA for Select Pressure & PVD Processes
Model: vision-2000-p-process-monitor-pvd-applications
Vision 2000-P™ RGA for Select Pressure & PVD Processes
Model: vision-2000-p-process-monitor-pvd-applications
Technical Specs
Mass Range
1-100, 1-200, or 1-300 amu
Ion Source
High conductance closed ion source
Filaments
Replaceable twin Tungsten or Thoria filaments
Mass Filter
Double filter (1 inch "RF only" pre-filter with 4 inch main filter)
Detector
Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure
7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure
<2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)
Minimum Detectable Concentration
<100ppb for all common gases except <10ppm for H2 (trace gas detection limit)
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange
DN35CF (70mm/2.75 inch OD) Conflat® flange
Vacuum Hardware
60 l/s Turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely inter locked and integrated.
Analyzer Housing Base Pressure
Better than 5e-9 Torr after bakeout
Bakeout Temperature and Bakeout Jacket
Included for 180°C bakeout
Operating Temperature
Electronics: 10-40°C
Mechanical Support
Optional stands and brackets are available
Mobile RGA Platform
Optional RGA trolley to improve versatility (footprint 18x24 inches, 455x604 mm)
Pneumatics
60-80 psig CDA
Power Requirements
88-264 VAC, 47/63 Hz, 600 Watts
Maximum Operating Conditions
80% RH (non condensing)
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Other Facilities
Leak check headset socket, external filament trip socket, instrument reset
Software
Process Eye Professional fully network compatible control platform generating under Microsoft® Windows® 2000, xP* or Vista* (*recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor
Process Eye Professional client/server configuration offers flexible multi-sensor operation
Shipping Weight
44 lbs (20 Kg)
Foreline Pump
Dry diaphragm standard; Other options available
Compliance
CE (control unit)
Technical Specs
Mass Range
1-100, 1-200, or 1-300 amu
Ion Source
High conductance closed ion source
Filaments
Replaceable twin Tungsten or Thoria filaments
Mass Filter
Double filter (1 inch "RF only" pre-filter with 4 inch main filter)
Detector
Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure
7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure
<2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)
Minimum Detectable Concentration
<100ppb for all common gases except <10ppm for H2 (trace gas detection limit)
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange
DN35CF (70mm/2.75 inch OD) Conflat® flange
Vacuum Hardware
60 l/s Turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely inter locked and integrated.
Analyzer Housing Base Pressure
Better than 5e-9 Torr after bakeout
Bakeout Temperature and Bakeout Jacket
Included for 180°C bakeout
Operating Temperature
Electronics: 10-40°C
Mechanical Support
Optional stands and brackets are available
Mobile RGA Platform
Optional RGA trolley to improve versatility (footprint 18x24 inches, 455x604 mm)
Pneumatics
60-80 psig CDA
Power Requirements
88-264 VAC, 47/63 Hz, 600 Watts
Maximum Operating Conditions
80% RH (non condensing)
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Other Facilities
Leak check headset socket, external filament trip socket, instrument reset
Software
Process Eye Professional fully network compatible control platform generating under Microsoft® Windows® 2000, xP* or Vista* (*recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor
Process Eye Professional client/server configuration offers flexible multi-sensor operation
Shipping Weight
44 lbs (20 Kg)
Foreline Pump
Dry diaphragm standard; Other options available
Compliance
CE (control unit)
Resources & Downloads
Application Notes
Drawings & CADs
Literature
Technical Notes