Vision 2000-P™ XD High Sensitivity RGAs for Select Pressure & PVD
Model: vision-2000-p-xd-process-monitor
Vision 2000-P™ XD High Sensitivity RGAs for Select Pressure & PVD
Model: vision-2000-p-xd-process-monitor
Technical Specs
Mass Range
1-100, 1-200, or 1-300 amu
Ion Source
High conductance closed ion source
Filaments
Replaceable twin Tungsten or Thoria filaments
Mass Filter
Double filter (1'' “RF only” pre-filter with 4'' main filter)
Detector
Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure
7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure
<2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)
Minimum Detectable Concentration
<15ppb (specified with Argon or Nitrogen for non-interfering peaks)
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange
DN35CF (70mm/2.75'' OD) Conflat® flange
Vacuum Hardware
60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely interlocked and integrated.
Analyzer Housing Base Pressure
Better than 5e-9 Torr after bakeout
Bakeout Temperature and Bakeout Jacket
Included for 180°C bakeout
Operating Temperature
Electronics: 10-40°C, 80% RH (non-condensing)
Weight
33 lbs. (15 kg) to bolt on Process System
Mobile RGA Platform
Optional RGA trolley to improve versatility (footprint 18x24'', 455x604 mm)
Pneumatics
60-80 psig CDA
Power Requirements
88-264 VAC, 47/63 Hz, 600 Watts
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control.
Other Facilities
Leak check headset socket, external filament trip socket, instrument reset
Software
Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® XP, Vista, Server 2008 or Windows 7* (*recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon XP 1.2GHz, 1GB RAM, 120 GB hard drive
Simultaneous Multi-Sensor
Process Eye Professional client/server configuration offers flexible multi-sensor operation process system and customer requirements.
Shipping Weight
44 lbs (20 Kg); can vary depending upon configuration.
Foreline Pump
Dry diaphragm standard; Other options available.
Compliance
CE
Technical Specs
Mass Range
1-100, 1-200, or 1-300 amu
Ion Source
High conductance closed ion source
Filaments
Replaceable twin Tungsten or Thoria filaments
Mass Filter
Double filter (1'' “RF only” pre-filter with 4'' main filter)
Detector
Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure
7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure
<2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)
Minimum Detectable Concentration
<15ppb (specified with Argon or Nitrogen for non-interfering peaks)
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange
DN35CF (70mm/2.75'' OD) Conflat® flange
Vacuum Hardware
60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely interlocked and integrated.
Analyzer Housing Base Pressure
Better than 5e-9 Torr after bakeout
Bakeout Temperature and Bakeout Jacket
Included for 180°C bakeout
Operating Temperature
Electronics: 10-40°C, 80% RH (non-condensing)
Weight
33 lbs. (15 kg) to bolt on Process System
Mobile RGA Platform
Optional RGA trolley to improve versatility (footprint 18x24'', 455x604 mm)
Pneumatics
60-80 psig CDA
Power Requirements
88-264 VAC, 47/63 Hz, 600 Watts
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control.
Other Facilities
Leak check headset socket, external filament trip socket, instrument reset
Software
Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® XP, Vista, Server 2008 or Windows 7* (*recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon XP 1.2GHz, 1GB RAM, 120 GB hard drive
Simultaneous Multi-Sensor
Process Eye Professional client/server configuration offers flexible multi-sensor operation process system and customer requirements.
Shipping Weight
44 lbs (20 Kg); can vary depending upon configuration.
Foreline Pump
Dry diaphragm standard; Other options available.
Compliance
CE