The 148J All Metal Control Valve minimizes particle generation and reduce outgassing of residual contaminants which could lead to device failures and poor yields. Metal seals with a guaranteed external leak rate of less than 1 x 10-10 atm cc/sec (He) are used in order to avoid contamination and corrosion. The 148 high temperature valve can operate to process temperatures of 150°C.
- 316 S.S, Nickel, Elgiloy, KM45, Teflon
- 10 to 30,000 sccm full scale flow ranges
- 4 VCR® male fittings
- Bakeable to 150°C See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 148JA11CR1MUpstream Flow Control Valve, 10 sccm Nitrogen, 4 VCR Male Fitting | |||||
![]() | 148JA12CR1MUpstream Flow Control Valve, 100 sccm Nitrogen, 4 VCR Male Fitting | |||||
![]() | 148JA13CR1MUpstream Flow Control Valve, 1000 sccm Nitrogen, 4 VCR Male Fitting | |||||
![]() | 148JA14CR1MUpstream Flow Control Valve, 10000 sccm Nitrogen, 4 VCR Male Fitting | |||||
![]() | 148JA21CR1MUpstream Flow Control Valve, 20 sccm Nitrogen, 4 VCR Male Fitting | |||||
![]() | 148JA22CR1MUpstream Flow Control Valve, 200 sccm Nitrogen, 4 VCR Male Fitting | |||||
![]() | 148JA23CR1MUpstream Flow Control Valve, 2000 sccm Nitrogen, 4 VCR Male Fitting | |||||
![]() | 148JA24CR1MUpstream Flow Control Valve, 20000 sccm Nitrogen, 4 VCR Male Fitting | |||||
![]() | 148JA51CR1MUpstream Flow Control Valve, 50 sccm Nitrogen, 4 VCR Male Fitting | |||||
![]() | 148JA52CR1MUpstream Flow Control Valve, 500 sccm Nitrogen, 4 VCR Male Fitting |
Specifications
- Type148J All-metal Flow Control Valve
- Full Scale Flow Range10 - 30,000 sccm
- Minimum Controllable Flow<2% Full Scale
- Closed Conductance Leakage<1% Full Scale (15 psid to atm)
- Exposed Materials316 S.S, Nickel, Elgiloy, KM45, Teflon
- Seal MaterialMetal
- Fitting Type4 VCR® male
- Operating Temperature15 to 50°C
- Bake Out Temperature150°C
Resources
Manuals
148J Pressure Control Valve User Manual(267 kB, PDF)
Drawings & CADs
148J Control Valve Model File(1.2 MB, STP)





