154B High Flow Control Valve

The MKS Instruments 154 High Flow Control Valve offers better response time as compared to other high flow control valves. This is possible through the use of a "balanced forces" design that automatically neutralizes the pressure-induced imbalances within the valve. The elastomer-sealed 154 valve is designed for flow rates from 0.2 to 200 slm.

316 S.S., Nickel and Viton® wetted materials (other seal materials optional)
20 to 200 slm full scale flow ranges
½” Swagelok®, 8 VCR, or 8 VCO® male fittings

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Showing 8 of 8 total products

Description	Compatibility	Full Scale Flow Range	Seal Material	Fitting Type	Price
0154B-200LRBUpstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Buna-N	UNIVERSAL	200 slm	Buna-N	8 VCR, male	$1,978
0154B-200LRKUpstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Kalrez	UNIVERSAL	200 slm	Kalrez	8 VCR, male	$2,220
0154B-200LRNUpstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Neoprene	UNIVERSAL	200 slm	Neoprene	8 VCR, male	$1,978
0154B-200LRVUpstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Viton	UNIVERSAL	200 slm	Viton	8 VCR, male	$1,978
0154B-200LSBUpstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Buna-N	UNIVERSAL	200 slm	Buna-N	0.5 in. Swagelok	$1,978
0154B-200LSKUpstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Kalrez	UNIVERSAL	200 slm	Kalrez	0.5 in. Swagelok	$1,978
0154B-200LSNUpstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Neoprene	UNIVERSAL	200 slm	Neoprene	0.5 in. Swagelok	$1,978
0154B-200LSVUpstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Viton	UNIVERSAL	200 slm	Viton	0.5 in. Swagelok	$1,978

Specifications

Type
154B High Flow Control Valve
Full Scale Flow Range
20 - 200 slm
Minimum Controllable Flow
0.1% of Full Scale
Closed Conductance Leakage
<0.1% of Full Scale (15 psid to atm)

Exposed Materials
Standard: 316 S.S., Nickel, Viton®
Optional: Buna-N, Kalrez®, Neoprene®
Seal Material
Elastomer
Fitting Type
Standard: 1/2 inch Swagelok®
Optional: 8 VCR or 8 VCO® male
Operating Temperature
-10 to 60°C