AX8415 Ultra High Concentration, High Flow Ozone Generator
Model: AX8415
AX8415 Ultra High Concentration, High Flow Ozone Generator
Model: AX8415
Overview
Overview
The AX8415 Ultra High Concentration, High Flow Ozone Generator converts oxygen to > 400 g/Nm3 of high concentration ozone for leading-edge applications in the semiconductor, flat panel display, and photovoltaic industries. The technology designed into the AX8415 is the basis of this generator’s versatility.
Technical Specs
- TypeOzone Gas Generator
- Ozone Outputup to 425 g/Nm3 (27.1 wt%)
- Flow Rate2.5 - 50 slm
- Feed GasO2 Grade 6 or better, or N2 100 ppm Grade 5 or better (optional)
- Nominal Cell Pressure (Delivery)15 - 45 psig (100 - 310 kPa)
- Pressure20 - 50 psig
- Control InterfaceFront panel control and remote operation
- Cooling Water Temperature5 - 25°C (41 - 77°F)
- Cooling Water Filtration100 microns
- Cooling Water QualityResistivity ≥50 kΩ/cm
- Minimum Water Flow9.4 lpm (2.5 gpm)
- Voltage Requirements208 VAC (±10%)
- Phase3Ø & Ground, no neutral
- Current Requirements20 Amps
- Frequency50/60 Hz
- Weight46.3 kg (102 lbs)
- Dimensions483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in) (width x depth x height)
- ComplianceCE, UL/CSA, SEMI F47 and RoHS
Technical Specs
- TypeOzone Gas Generator
- Ozone Outputup to 425 g/Nm3 (27.1 wt%)
- Flow Rate2.5 - 50 slm
- Feed GasO2 Grade 6 or better, or N2 100 ppm Grade 5 or better (optional)
- Nominal Cell Pressure (Delivery)15 - 45 psig (100 - 310 kPa)
- Pressure20 - 50 psig
- Control InterfaceFront panel control and remote operation
- Cooling Water Temperature5 - 25°C (41 - 77°F)
- Cooling Water Filtration100 microns
- Cooling Water QualityResistivity ≥50 kΩ/cm
- Minimum Water Flow9.4 lpm (2.5 gpm)
- Voltage Requirements208 VAC (±10%)
- Phase3Ø & Ground, no neutral
- Current Requirements20 Amps
- Frequency50/60 Hz
- Weight46.3 kg (102 lbs)
- Dimensions483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in) (width x depth x height)
- ComplianceCE, UL/CSA, SEMI F47 and RoHS
Resources & Downloads
Drawings & CADs
AX8415 Ozone Generator Dimensional Drawings(374.5 kB, PDF)