AX8580 Fully Integrated Modular Ozone Delivery System
Model: AX8580
AX8580 Fully Integrated Modular Ozone Delivery System
Model: AX8580
Overview
Overview
The AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. This standalone, fully integrated modular ozone system can be equipped with up to (4) AX8415 generators and configured as a multi-channel system to deliver ozone for up to 4 channels, supporting multiple chambers or multiple tools. Flow rates of up to 50 slm per channel and concentrations greater than 400 g/Nm3 are achievable at peak system configuration. An optional in-rack chiller is available for ultra-high concentrations and extended generator lifetime.
Technical Specs
- TypeOzone Gas Delivery System
- Ozone Output>400g/Nm3
- Flow Rate2.5 gpm per generator
- Feed GasOxygen, Nitrogen
- Feed Gas Supply Pressure70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm2) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm2) maximum N2 pressure 10 psi higher than O2 pressure
- Feed Gas Purity99.9995% minimum
- Operating Temperature5 - 40°C (41 - 104°F)
- Cooling Water Temperature Required5 - 17°C
- Cooling Water Filtration Required100 microns
- Cooling Water Quality Required1 - 3 MΩcm DI
- Cooling Water Minimum Flow Required2.5 gpm per generator
- Cooling Water Connections Required1 in. compression (Swagelok®)
- Cooling Water Heat Load Required5 kw per generator
- Voltage Requirements208 volts AC (±10%), three phase
- Current Requirements65 Amps max (fully populated system)
- Frequency50/60 Hz
- Exhaust Flow RateTwo-generator system requires 125 CFM (3.5m3/min), Four-generator system requires 250 CFM (7m3/min), Static Pressure 125CFM (3.5m3/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m3/min)
- Exhaust TypeSEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
- Exhaust Static Pressure0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
- Control Air Pressure70 - 100 psig (483 - 689 kPa)
- Control Air TypeCDA or dry nitrogen, 40µ filtered
- Control Air Fitting0.25 in. compression (Swagelok®)
- Exhaust Connection6 in. diameter duct opening standard
- Dimensions26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
- Relative Humidity30 - 90% (non - condensing)
- Weight705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
- ComplianceETL 9700614, SEMI S2-0715
- AltitudeUp to 1000 m (3280 ft) above mean sea level
Technical Specs
- TypeOzone Gas Delivery System
- Ozone Output>400g/Nm3
- Flow Rate2.5 gpm per generator
- Feed GasOxygen, Nitrogen
- Feed Gas Supply Pressure70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm2) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm2) maximum N2 pressure 10 psi higher than O2 pressure
- Feed Gas Purity99.9995% minimum
- Operating Temperature5 - 40°C (41 - 104°F)
- Cooling Water Temperature Required5 - 17°C
- Cooling Water Filtration Required100 microns
- Cooling Water Quality Required1 - 3 MΩcm DI
- Cooling Water Minimum Flow Required2.5 gpm per generator
- Cooling Water Connections Required1 in. compression (Swagelok®)
- Cooling Water Heat Load Required5 kw per generator
- Voltage Requirements208 volts AC (±10%), three phase
- Current Requirements65 Amps max (fully populated system)
- Frequency50/60 Hz
- Exhaust Flow RateTwo-generator system requires 125 CFM (3.5m3/min), Four-generator system requires 250 CFM (7m3/min), Static Pressure 125CFM (3.5m3/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m3/min)
- Exhaust TypeSEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
- Exhaust Static Pressure0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
- Control Air Pressure70 - 100 psig (483 - 689 kPa)
- Control Air TypeCDA or dry nitrogen, 40µ filtered
- Control Air Fitting0.25 in. compression (Swagelok®)
- Exhaust Connection6 in. diameter duct opening standard
- Dimensions26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
- Relative Humidity30 - 90% (non - condensing)
- Weight705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
- ComplianceETL 9700614, SEMI S2-0715
- AltitudeUp to 1000 m (3280 ft) above mean sea level
Resources & Downloads
Drawings & CADs
AX8580 Ozone Delivery System Dimensional Drawing(825.4 kB, PDF)