The CMA50A Mass Flow Controller (MFC) is a compact, fast response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 14000 sccm to 50000 sccm, N2 with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale and is also available as a flow meter. Either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP) communication interfaces are available. The required power supply voltage is 24 VDC nominal.