GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers
Model: GM50A013103RMM020
GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers
Model: GM50A013103RMM020
Overview
Overview
The G-Series GM50A013103RMM020 metal-sealed, digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 1000 sccm and a control range of 20 to 1000 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range1000 sccm
- Control Range20 - 1000 sccm
- Calibration GasN2 (or equivalent)
- Fitting Type4 VCR male
- Seal MaterialMetal
- Flow Input Output Signal0 - 5 VDC
- Analog Connector15-pin D-sub (tied grounds)
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability± 0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non-condensing
- Storage Temperature-20 to 80°C
- External Leak Integrity<1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere
- Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
- Surface Finish10µ inch average Ra (electropolished)
- Weight3 lbs (1.4 kg)
- ComplianceCE
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range1000 sccm
- Control Range20 - 1000 sccm
- Calibration GasN2 (or equivalent)
- Fitting Type4 VCR male
- Seal MaterialMetal
- Flow Input Output Signal0 - 5 VDC
- Analog Connector15-pin D-sub (tied grounds)
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability± 0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non-condensing
- Storage Temperature-20 to 80°C
- External Leak Integrity<1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere
- Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
- Surface Finish10µ inch average Ra (electropolished)
- Weight3 lbs (1.4 kg)
- ComplianceCE