Multi-gas, Multi-range, Metal-sealed, 5-50,000 sccm Mass Flow Controller

The GM50A & GM51A digitally-controlled mass flow controllers are available with either analog or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.

Flow rates from 5 to 50,000 sccm
Metal sealed with Teflon valve plug
Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog I/O
Standard closed conductance leak rate of less than 1.0% of Full Scale
Less than 750 millisecond settling time

See All Features

Description	Compatibility	Full Scale Flow Range	Fitting Type	Analog Connector	Price
GM50A013101RMM020Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	10 sccm	4 VCR male	15-pin D-sub (tied grounds)	$2,343
GM50A013101SMM020Mass Flow Controller, 10 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	10 sccm	0.25 in. Swagelok-style	15-pin D-sub (tied grounds)	$2,343
GM50A013102RMM020Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	100 sccm	4 VCR male	15-pin D-sub (tied grounds)	$2,343
GM50A013103RMM020Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	1000 sccm	4 VCR male	15-pin D-sub (tied grounds)	$2,343
GM50A013103SMM020Mass Flow Controller, 1000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	1000 sccm	0.25 in. Swagelok-style	15-pin D-sub (tied grounds)	$2,343
GM50A013201RMM020Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	20 sccm	4 VCR male	15-pin D-sub (tied grounds)	$2,343
GM50A013202RMM020Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	200 sccm	4 VCR male	15-pin D-sub (tied grounds)	$2,343
GM50A013203RMM020Mass Flow Controller, 2000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	2000 sccm	4 VCR male	15-pin D-sub (tied grounds)	$2,343
GM50A013204RMM020Mass Flow Controller, 20000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	20,000 sccm	4 VCR male	15-pin D-sub (tied grounds)	$2,343
GM50A013204SMM020Mass Flow Controller, 20000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal	UNIVERSAL	20,000 sccm	0.25 in. Swagelok-style	15-pin D-sub (tied grounds)	$2,343

Show All

Configuration Options

The following options are available for GM50A Mass Flow Controllers
Ordering Code Example: GM50A013502R6V020

Configuration Option	Option Code
GM50A Mass Flow Controller	GM50A
Gas (Per Semi Standard E52-0703)
Nitrogen (N₂)	013
Ammonia (NH₃)	029
Sulfur Hexafluoride (SF₆)	110
Other Gas Options	See Here
Flow Range Full Scale
5 sccm	500
10 sccm	101
20 sccm	201
50 sccm	501
100 sccm	102
200 sccm	202
500 sccm	502
1000 sccm	103
2000 sccm	203
5000 sccm	503
10000 sccm	104
20000 sccm	204
30000 sccm	304
50000 sccm	504
Fittings (compatible with)
6 mm Swagelok	M
8 mm Swagelok	E
10 mm Swagelok	P
12 mm Swagelok	F
1/8 in. Swagelok (1000 sccm or below)	A
1/4 in. Swagelok	S
1/2 in. Swagelok	K
3/8 in. Swagelok	J
2 VCR Male (1000 sccm or below)	B
4 VCR Male	R
8 VCR Male	T
C-seal surface mount	C
W-seal surface mount	H
NW16 ISO-KF	U
Connector
EtherCAT	8
DeviceNet	6
RS485 (uses 9 pin connector)	5
Profibus (1480 Compatible)	4
Profibus (1179B Compatible)	3
PROFINET	9
Analog 0 to 5 VDC (9 pin D connector)	A
Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds	L
Analog 0 to 5 VDC (15 pin D connector)	B
Analog 0 to 5 VDC (15 pin D connector), Tied Grounds	M
Analog 4 to 20 mA (15 pin D connector)	H
Valve/Device Type
Normally Closed/Mass Flow Controller, Teflon®	M0
No Valve/Mass Flow Meter	30
Normally Open/Mass Flow Controller, Teflon®	PT
Firmware
MKS will ship firmware revision current to date	20

The following options are available for GM51A Mass Flow Controllers
Ordering Code Example: GM51A013502R6V020

Configuration Option	Option Code
GM51A Mass Flow Controller	GM51A
Gas (Per Semi Standard E52-0703)
Nitrogen (N₂)	013
Ammonia (NH₃)	029
Sulfur Hexafluoride (SF₆)	110
Other Gas Options	See Here
Flow Range Full Scale
5 sccm	500
10 sccm	101
20 sccm	201
50 sccm	501
100 sccm	102
200 sccm	202
500 sccm	502
1000 sccm	103
2000 sccm	203
5000 sccm	503
10000 sccm	104
20000 sccm	204
30000 sccm	304
50000 sccm	504
Fittings (compatible with)
4 VCR Male	R
C-seal surface mount as per SEMI 2787.1	C
W-seal surface mount as per SEMI 2787.3F	H
Connector
EtherCAT	8
DeviceNet	6
RS485 (uses 9 pin connector)	5
PROFINET	9
Analog 0 to 5 VDC (9 pin D connector)	A
Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds	L
Analog 0 to 5 VDC (15 pin D connector)	B
Analog 0 to 5 VDC (15 pin D connector), Tied Grounds	M
Valve/Device Type
Normally Closed/Mass Flow Controller, Teflon®	M0
No Valve/Mass Flow Meter	30
Reserved for Future Use
Std.	0
Firmware
MKS will ship firmware revision current to date	20

	Description
	GM50A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.45 in. Wide
	GM51A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.25 in. Wide

Specifications

Type
Mass Flow Controller (MFC)
Full Scale Flow Range
5 - 50000 sccm (N2 equivalent)
Control Range
2-100% of Full Scale
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Typical Accuracy
±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
± 0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C

Inlet Pressure Coefficient
<0.02% of Reading/psi
Typical Settling Time
<750 msec, typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10°C to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
Weight
3 lbs (1.4 kg)
Compliance
CE

Features

Wide Choice of Digital and Analog Interfaces

The GM50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).

Standard 3 inch Footprint

The GM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.

Metal Sealed

The GM50A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.

Percent of Setpoint Accuracy

Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface

An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor

A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

Communication Options/Specifications

Digital I/O	DeviceNet™	RS485	Profibus®	EtherCAT®	PROFINET®
Input Power Required	+11 to +25 VDC per (<2 watts)	+15 to +24 VDC (<2 watts)	+15 to +24 VDC (<2 watts)	+24 VDC (<3 watts)	+24 VDC (<3 watts)
Connector	5 pin micro connector (power and comm.)	9 pin Type D male (power and comm.)	9 pin Type D male (power) 9 pin Type D female (comm.)	2 x RJ-45 (comm.) male, M8 male, 5 pin (power)	2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
Data Rate Switch/Selection	4 positions: 125, 250, 500K (Default) (programmable over network)	No switch Set data rate via RS485	No switch Set data rate via Profibus	No switch	No switch
Comm. Rate(s)	125 Kbps; 250 Kbps; 500 Kbps	9.6 Kbps; 19.2 Kbps 38.4 Kbps	9.6 Kbps to 12 Mbps	100 Mbps	100 Mbps
MAC ID Switches/Addresses	2 switches, 10 positions; 0,0 to 6,3 1 to 254	Set address over RS485 Station Addresses 0,0 to 9,9	2 switches, 10 positions	3 switches, 16 positions	N/A
Network Size	Up to 64 nodes	Up to 32 nodes	Up to 99 nodes	Up to 4095 nodes	N/A
Visual Indicators	LED Network (green/red) LED Module (green/red)	LED Comm (yellow) LED Error (red)	LED Comm (green/red) LED Error (green/red)	LED Power (green) LED Run (green) LED Error (red) LED Comm (green)	LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red)
Compliance	CE	CE	CE	CE	CE

Accessories

Description	Compatibility	Price
CB147-12-10Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	$93
CB147-1-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	$137
100016744Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft.	UNIVERSAL	$104
100016745Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft.	UNIVERSAL	$160
100016746Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft.	UNIVERSAL	$276
CB259-5-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	$179
100019087Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft.	UNIVERSAL	$117
100019088Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft.	UNIVERSAL	$186
100019089Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft.	UNIVERSAL	$511
RCBDMFC-3-10Cable, Mass Flow Controller, RoHS, DB9, 10 ft.	UNIVERSAL	$222
RCBDMFC-1-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	$158
RCB147-1-10Mass Flow Meter Cable, PR4000 Controller to DB15 Mass Flow Meters, 10 ft.	UNIVERSAL	$294
RCBDMFC-4-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	$244
RCB147-12-10Mass Flow Meter Cable, PR4000 Controller to DB9 Mass Flow Meters, 10 ft.	UNIVERSAL
RCB147-7-10Mass Flow Meter Cable, PR4000 Controller to 20-pin Card Edge Meters, 10 ft.	UNIVERSAL