GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers
Model: GM50A013101SMM020
GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers
Model: GM50A013101SMM020
Overview
Overview
The G-Series GM50A013101SM020 metal-sealed, digitally-controlled mass flow controller has a Full Scale Flow Range of 10 sccm and a control range of 0.2 to 10 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. It utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range10 sccm
- Control Range0.2 - 10 sccm
- Calibration GasN2 (or equivalent)
- Fitting Type0.25 in. Swagelok-style
- Seal MaterialMetal
- Flow Input Output Signal0 - 5 VDC
- Analog Connector15-pin D-sub (tied grounds)
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability± 0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non-condensing
- Storage Temperature-20 to 80°C
- External Leak Integrity<1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere
- Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
- Surface Finish10µ inch average Ra (electropolished)
- Weight3 lbs (1.4 kg)
- ComplianceCE
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range10 sccm
- Control Range0.2 - 10 sccm
- Calibration GasN2 (or equivalent)
- Fitting Type0.25 in. Swagelok-style
- Seal MaterialMetal
- Flow Input Output Signal0 - 5 VDC
- Analog Connector15-pin D-sub (tied grounds)
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability± 0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non-condensing
- Storage Temperature-20 to 80°C
- External Leak Integrity<1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere
- Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
- Surface Finish10µ inch average Ra (electropolished)
- Weight3 lbs (1.4 kg)
- ComplianceCE