Metal Etch Process Traps
Model: MetalEtchTrap
Metal Etch Process Traps
Model: MetalEtchTrap

Overview
Overview
Our Metal Etch Process Trap, when installed as a component in an Effluent Management Subsystem™, efficiently traps condensable effluents that are generated by aluminum etch processes without reducing pumping speed. High trapping capacity means a longer time between maintenance. Maintenance is simplified as you replace a single disposable trapping element rather than having to clean up many feet of vacuum line. Low cost of ownership is created by not having to run heated lines all the way to the scrubber.
Technical Specs
- TypeMetal Etch Process Trap
- Body Size6 or 8 in.
- Flange TypeISO-KF
- Flange SizeNW40 or NW50
- ConfigurationInline
- Seal MaterialViton®
- Capacity3 lbs. AICl3
- Exposed MaterialsStainless Steel, Viton®
- Pressure Dropp=pressure in mTorr, c=1355+5.73p (Viscous Flow Region)
- Dry Weight13 lbs (5.9 kg)
- Cooling Water Flow Rate>6 gal/hr (400 ml/min)
- Cooling Water Temperature< 86° F (30° C)
- Flow Conductancep=pressure in mTorr, c(sscm/mTorr) = 1.4p, slightly higher than 3 inch tube
Technical Specs
- TypeMetal Etch Process Trap
- Body Size6 or 8 in.
- Flange TypeISO-KF
- Flange SizeNW40 or NW50
- ConfigurationInline
- Seal MaterialViton®
- Capacity3 lbs. AICl3
- Exposed MaterialsStainless Steel, Viton®
- Pressure Dropp=pressure in mTorr, c=1355+5.73p (Viscous Flow Region)
- Dry Weight13 lbs (5.9 kg)
- Cooling Water Flow Rate>6 gal/hr (400 ml/min)
- Cooling Water Temperature< 86° F (30° C)
- Flow Conductancep=pressure in mTorr, c(sscm/mTorr) = 1.4p, slightly higher than 3 inch tube
