Vision 2000-C™-E™ XD High Sensitivity RGAs for Multi-pressure & CVD/ALD
Model: VISION-2000-C-XD
Vision 2000-C™-E™ XD High Sensitivity RGAs for Multi-pressure & CVD/ALD
Model: VISION-2000-C-XD
Overview
Overview
The Vision 2000-C™ XD 1-300 amu Residual Gas Analyzers incorporate patented V-lens™ technology, taking the proven performance of the Vision 2000-C™ and Vision 2000-E™ systems to a new level of sensitivity and reliability, previously unachievable with conventional quadrupole mass spectrometry systems. The patented V-lens™ design provides increased sensitivity (<15ppb specified with Argon or Nitrogen) and reproducibility for the most challenging applications, such as tracking levels of various gas species during etch processes and the chamber clean, passivation sequences, and deposition steps for various ALD, CVD, and Etch processes. V-lens™ overcomes the issues faced with challenging gases (such as Argon) that limit the detection power of conventional systems. In combination with the "smart head" RGA technology of the Microvision 2, closed ion source and close-coupled inlet, this configuration enables sensitive, reproducible and seamless monitoring of the most challenging ALD, CVD, and Etch applications
Technical Specs
- Mass Range1 - 300 amu
- Ion SourceHigh conductance closed ion source
- FilamentsTwin Tungsten filaments
- Mass FilterDouble filter (1 in. "RF only" pre-filter with 4 in. main filter)
- DetectorDual (Faraday and secondary electron multiplier)
- Maximum Analyzer Operating Pressure1e-3 Torr at the ion source inlet (standard), higher pressure optional
- Minimum Detectable Concentration<15 ppb specified with Argon or Nitrogen
- Mass StabilityBetter than ±0.1 amu over 8 hours
- ResolutionBetter than 10% valley for peaks of equal height across mass range
- Base Pressure RangeIon source at maximum pressure at 1, 10 or 100 mTorr
- Process Pressure RangeIon source at maximum pressure at 10, 100, 500, 1.5, 5, 10, 40, 100 or 700 Torr (*Optional gas acceleration for ranges <10 Torr available. For other inlet and process pressure ranges, please consult the factory).
- Mounting FlangeDN35CF (70 mm/2.75 in. OD) Conflat. Custom adapters can be provided.
- Vacuum Hardware60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, UniBloc™ inlet, automated vacuum control (RVC) completely interlocked and integrated
- Backing Vacuum SystemStandard: Connected to the tool foreline pump via Surge Protect assembly with a KF16 fitting, Optional: Independent chemically resistant, dry diaphragm pump with KF16 fitting for connecting the exhaust to a suitable scrubber system
- Analyzer Housing Base PressureBetter than 5e-9 Torr after bakeout
- Bake Out Temperature180°C with Bakeout Jacket
- Operating Temperature90°C (controlled to ±1°C)
- Weight33 lbs. (15 kg) to bolt on Process System
- Mechanical SupportOptional stands and brackets are available
- Mobile RGA PlatformOptional RGA trolley to improve versatility (footprint 18 x 24 in., 455 x 604 mm)
- Pneumatics60-80 psig CDA
- Electronics Weight on Flange1.7 kg
- Power Requirements88 - 264 VAC, 47/63 Hz, 600 W
- Maximum Operating ConditionsElectronics: 10 - 40°C, 80% RH (non condensing)
- LED Status IndicationInterlock status, filament emission, SEM, power and communications
- I/O Capability4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
- Other FacilitiesLeak check headset socket, external filament trip socket, instrument reset
- SoftwareProcess Eye Professional fully network compatible control platform generating under 32 bit or 64 bit Microsoft Windows XP, Vista, Server 2008 or Windows 7
- CommunicationEthernet CAT-5e
- PC RequirementsIntel Pentium IV or AMD Athlon XP 1.2 GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
- Simultaneous Multi-SensorProcess Eye Professional client/server configuration offers flexible multi-sensor operation.
- RGA to Vacuum System Cable Length33 ft. (10 m) standard RGA and 10 ft. (3 m) with mobile RGA platform. Other lengths available dependent upon process system and customer requirements
- Shipping Weight44 lbs (20 kg) may vary depending upon backing pump and instrument rack requirements
- TypeResidual Gas Analyzer
- Measurement TechniqueMass Spectrometry
- ComplianceCompliant to RoHS Directive 2002/95/EC (control unit)
Technical Specs
- Mass Range1 - 300 amu
- Ion SourceHigh conductance closed ion source
- FilamentsTwin Tungsten filaments
- Mass FilterDouble filter (1 in. "RF only" pre-filter with 4 in. main filter)
- DetectorDual (Faraday and secondary electron multiplier)
- Maximum Analyzer Operating Pressure1e-3 Torr at the ion source inlet (standard), higher pressure optional
- Minimum Detectable Concentration<15 ppb specified with Argon or Nitrogen
- Mass StabilityBetter than ±0.1 amu over 8 hours
- ResolutionBetter than 10% valley for peaks of equal height across mass range
- Base Pressure RangeIon source at maximum pressure at 1, 10 or 100 mTorr
- Process Pressure RangeIon source at maximum pressure at 10, 100, 500, 1.5, 5, 10, 40, 100 or 700 Torr (*Optional gas acceleration for ranges <10 Torr available. For other inlet and process pressure ranges, please consult the factory).
- Mounting FlangeDN35CF (70 mm/2.75 in. OD) Conflat. Custom adapters can be provided.
- Vacuum Hardware60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, UniBloc™ inlet, automated vacuum control (RVC) completely interlocked and integrated
- Backing Vacuum SystemStandard: Connected to the tool foreline pump via Surge Protect assembly with a KF16 fitting, Optional: Independent chemically resistant, dry diaphragm pump with KF16 fitting for connecting the exhaust to a suitable scrubber system
- Analyzer Housing Base PressureBetter than 5e-9 Torr after bakeout
- Bake Out Temperature180°C with Bakeout Jacket
- Operating Temperature90°C (controlled to ±1°C)
- Weight33 lbs. (15 kg) to bolt on Process System
- Mechanical SupportOptional stands and brackets are available
- Mobile RGA PlatformOptional RGA trolley to improve versatility (footprint 18 x 24 in., 455 x 604 mm)
- Pneumatics60-80 psig CDA
- Electronics Weight on Flange1.7 kg
- Power Requirements88 - 264 VAC, 47/63 Hz, 600 W
- Maximum Operating ConditionsElectronics: 10 - 40°C, 80% RH (non condensing)
- LED Status IndicationInterlock status, filament emission, SEM, power and communications
- I/O Capability4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
- Other FacilitiesLeak check headset socket, external filament trip socket, instrument reset
- SoftwareProcess Eye Professional fully network compatible control platform generating under 32 bit or 64 bit Microsoft Windows XP, Vista, Server 2008 or Windows 7
- CommunicationEthernet CAT-5e
- PC RequirementsIntel Pentium IV or AMD Athlon XP 1.2 GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
- Simultaneous Multi-SensorProcess Eye Professional client/server configuration offers flexible multi-sensor operation.
- RGA to Vacuum System Cable Length33 ft. (10 m) standard RGA and 10 ft. (3 m) with mobile RGA platform. Other lengths available dependent upon process system and customer requirements
- Shipping Weight44 lbs (20 kg) may vary depending upon backing pump and instrument rack requirements
- TypeResidual Gas Analyzer
- Measurement TechniqueMass Spectrometry
- ComplianceCompliant to RoHS Directive 2002/95/EC (control unit)
Resources & Downloads
Drawings & CADs
Vision 2000-C™ XD & Vision 2000-E™ XD Dimensional Drawing(388.8 kB, PDF)