Vision 2000-P™ XD High Sensitivity RGAs for Select Pressure & PVD
Model: VISION-2000-P-XD
Vision 2000-P™ XD High Sensitivity RGAs for Select Pressure & PVD
Model: VISION-2000-P-XD

Overview
Overview
The Vision 2000-P™ XD incorporates V-lens™ technology, taking the proven performance of the Vision 2000-P™ system to a new level of sensitivity and reliability, previously unachievable with conventional quadrupole mass spectrometry systems. The patented V-lens™ design enables significantly improved detection power for the most challenging thin film PVD processes where ppb detection of contaminants, gas leaks, or process gases is required. V-lens™ overcomes the issues faced with challenging gases (such as Argon) that limit the detection power of conventional systems, providing a clear advantage for monitoring and detection of trace gases. With V-lens technology, process engineers can identify and prevent issues faster and easier while maximizing yield. In combination with the "smart head" RGA technology of the Microvision 2, closed ion source and close-coupled inlet, this configuration enables sensitive, reproducible and seamless monitoring of the most challenging PVD applications.
Technical Specs
- Mass Range1-100, 1-200, or 1-300 amu
- Ion SourceHigh conductance closed ion source
- FilamentsTwin Tungsten or Thoria filaments
- Mass FilterDouble filter (1 in. "RF only" pre-filter with 4 in. main filter)
- DetectorDual (Faraday and secondary electron multiplier)
- Maximum Analyzer Operating Pressure7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
- Minimum Detectable Concentration<15 ppb specified with Argon or Nitrogen
- Mass StabilityBetter than ±0.1 amu over 8 hours
- ResolutionBetter than 10% valley for peaks of equal height across mass range
- Mounting FlangeDN35CF (70 mm/2.75 in. OD) Conflat
- Vacuum Hardware60 l/s Turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely inter locked and integrated.
- Analyzer Housing Base PressureBetter than 5e-9 Torr after bakeout
- Bake Out Temperature180°C with Bakeout Jacket
- Weight33 lbs. (15 kg) to bolt-on Process System
- Mechanical SupportOptional stands and brackets are available
- Mobile RGA PlatformOptional RGA trolley to improve versatility (footprint 18 x 24 in., 455 x 604 mm)
- Pneumatics60-80 psig CDA
- Electronics Weight on Flange1.7 kg
- Power Requirements88 - 264 VAC, 47/63 Hz, 600 W
- Maximum Operating ConditionsElectronics: 10 - 40°C, 80% RH (non condensing)
- LED Status IndicationInterlock status, filament emission, SEM, power and communications
- I/O Capability4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
- Other FacilitiesLeak check headset socket, external filament trip socket, instrument reset
- SoftwareProcess Eye Professional fully network compatible control platform generating under Microsoft Windows 2000, XP or Vista
- CommunicationEthernet CAT-5e
- PC RequirementsIntel Pentium IV or AMD Athlon XP 1.2 GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
- Simultaneous Multi-SensorProcess Eye Professional client/server configuration offers flexible multi-sensor operation.
- RGA to Vacuum System Cable Length33 ft. (10 m) standard RGA and 10 ft. (3 m) with mobile RGA platform. Other lengths available dependent upon process system and customer requirements
- Shipping Weight44 lbs (20 kg) may vary depending upon backing pump and instrument rack requirements
- Foreline PumpDry diaphragm standard, Other options available
- TypeResidual Gas Analyzer
- Measurement TechniqueMass Spectrometry
- ComplianceCompliant to RoHS Directive 2002/95/EC (control unit)
Technical Specs
- Mass Range1-100, 1-200, or 1-300 amu
- Ion SourceHigh conductance closed ion source
- FilamentsTwin Tungsten or Thoria filaments
- Mass FilterDouble filter (1 in. "RF only" pre-filter with 4 in. main filter)
- DetectorDual (Faraday and secondary electron multiplier)
- Maximum Analyzer Operating Pressure7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
- Minimum Detectable Concentration<15 ppb specified with Argon or Nitrogen
- Mass StabilityBetter than ±0.1 amu over 8 hours
- ResolutionBetter than 10% valley for peaks of equal height across mass range
- Mounting FlangeDN35CF (70 mm/2.75 in. OD) Conflat
- Vacuum Hardware60 l/s Turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely inter locked and integrated.
- Analyzer Housing Base PressureBetter than 5e-9 Torr after bakeout
- Bake Out Temperature180°C with Bakeout Jacket
- Weight33 lbs. (15 kg) to bolt-on Process System
- Mechanical SupportOptional stands and brackets are available
- Mobile RGA PlatformOptional RGA trolley to improve versatility (footprint 18 x 24 in., 455 x 604 mm)
- Pneumatics60-80 psig CDA
- Electronics Weight on Flange1.7 kg
- Power Requirements88 - 264 VAC, 47/63 Hz, 600 W
- Maximum Operating ConditionsElectronics: 10 - 40°C, 80% RH (non condensing)
- LED Status IndicationInterlock status, filament emission, SEM, power and communications
- I/O Capability4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
- Other FacilitiesLeak check headset socket, external filament trip socket, instrument reset
- SoftwareProcess Eye Professional fully network compatible control platform generating under Microsoft Windows 2000, XP or Vista
- CommunicationEthernet CAT-5e
- PC RequirementsIntel Pentium IV or AMD Athlon XP 1.2 GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
- Simultaneous Multi-SensorProcess Eye Professional client/server configuration offers flexible multi-sensor operation.
- RGA to Vacuum System Cable Length33 ft. (10 m) standard RGA and 10 ft. (3 m) with mobile RGA platform. Other lengths available dependent upon process system and customer requirements
- Shipping Weight44 lbs (20 kg) may vary depending upon backing pump and instrument rack requirements
- Foreline PumpDry diaphragm standard, Other options available
- TypeResidual Gas Analyzer
- Measurement TechniqueMass Spectrometry
- ComplianceCompliant to RoHS Directive 2002/95/EC (control unit)
Resources & Downloads
Drawings & CADs
Vision 2000-P™ XD Dimensions(313.7 kB, PDF)
