The AX8410 PRIME is part of MKS’ next generation platform of compact, high concentration, ultra high flow, ultra clean ozone generators. It uses a patented cell and power structure to achieve twice the ozone output of earlier models while maintaining a similar footprint.

The AX8410 PRIME converts oxygen to ozone through silent electrical discharge. Its novel patented cell design supports new process requirements requiring higher ozone concentrations at flow rates up to 80 slm. The increased flow rate and higher concentration position the AX8410 PRIME generator to meet the ozone requirements for the next generation of semiconductor processes.