AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator
Model: AX8410
AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator
Model: AX8410
Overview
Overview
The AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator converts oxygen to ozone through silent electrical discharge at flow rates up to 80 slm. The increased flow rate and higher concentration position the AX8410 PRIME generator to meet the ozone requirements for the next generation of semiconductor processes.
Technical Specs
- TypeOzone Gas Generator
- Ozone Outputup to 335 g/Nm3
- Flow Rate5 - 80 slm
- Feed GasOxygen: Grade 6 or better O2, Nitrogen: 100 - 1000 ppm Grade 5 or better N2
- Nominal Cell Pressure (Delivery)15 - 45 psig (100 - 310 kPa)
- Pressure20 - 50 psig
- Control InterfaceFront panel control and remote operation
- Cooling Water Temperature5 - 25°C (41 - 77°F)
- Cooling Water Filtration100 microns
- Cooling Water QualityResistivity ≥50 KΩ/cm
- Minimum Water Flow22.7 lpm (6.0 gpm)
- Voltage Requirements208 VAC (±10%)
- Phase3Ø & Ground, no Neutral
- Current Requirements50 Amps
- Frequency50/60 Hz
- Weight77 kg (170 lb)
- Dimensions483 x 521 x 267 mm (19.0 x 20.5 x 10.5 in) (width x depth x height)
- ComplianceCE, UL/CSA, and SEMI F47
Technical Specs
- TypeOzone Gas Generator
- Ozone Outputup to 335 g/Nm3
- Flow Rate5 - 80 slm
- Feed GasOxygen: Grade 6 or better O2, Nitrogen: 100 - 1000 ppm Grade 5 or better N2
- Nominal Cell Pressure (Delivery)15 - 45 psig (100 - 310 kPa)
- Pressure20 - 50 psig
- Control InterfaceFront panel control and remote operation
- Cooling Water Temperature5 - 25°C (41 - 77°F)
- Cooling Water Filtration100 microns
- Cooling Water QualityResistivity ≥50 KΩ/cm
- Minimum Water Flow22.7 lpm (6.0 gpm)
- Voltage Requirements208 VAC (±10%)
- Phase3Ø & Ground, no Neutral
- Current Requirements50 Amps
- Frequency50/60 Hz
- Weight77 kg (170 lb)
- Dimensions483 x 521 x 267 mm (19.0 x 20.5 x 10.5 in) (width x depth x height)
- ComplianceCE, UL/CSA, and SEMI F47
Resources & Downloads
Drawings & CADs
AX8410 Ozone Generator Dimensional Drawing(224.4 kB, PDF)